MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope

Liu, Tianbo; Rajadhyaksha, Milind; Dickensheets, David L.

doi:10.1038/s41377-019-0167-5

Cited by 22 publications

(8 citation statements)

References 58 publications

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“…In the last decade, different approaches to micro electromechanical (MEMS) mirrors have been pursued, mainly depending on the actuation system. Piezoelectric [ 1 ], capacitive [ 2 ], magnetic [ 3 , 4 ], and thermomechanical [ 5 ] actuation mirrors were developed, and their use was demonstrated in a plethora of applications.…”

Section: Introductionmentioning

confidence: 99%

High Frequency MEMS Capacitive Mirror for Space Applications

et al. 2023

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Free space optics laser communication using modulating retroreflectors (MR) is a challenging application for an active mirror, due to the high frequencies (>100 kHz) required to enable sufficient data transfer. Micro Electromechanical (MEMS) mirrors are a promising option for high-frequency applications, given the very small moving mass typical of such devices. Capacitive MEMS mirrors are presented here for free space communications, based on a novel fabrication sequence that introduces a single-layer thin film aluminum mirror structure with an underlying silicon oxide sacrificial layer. The use of aluminum instead of gold as a mirror layer diminishes the heating generated by the absorption of the sun’s radiation once the mirrors exit the earth’s atmosphere. Thanks to the novel fabrication sequence, the presented mirror devices have a full range actuation voltage of less than 40 V, and a high operational frequency with an eigenfrequency above 2 MHz. The devices were manufactured and characterized, and their main parameters were obtained from experimental data combined with finite element analysis, thus enabling future design optimization of the reported MEMS technology. By optical characterization of the far field diffraction pattern, good mirror performance was demonstrated.

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Section: Introductionmentioning

confidence: 99%

High Frequency MEMS Capacitive Mirror for Space Applications

et al. 2023

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“…Nevertheless, the bending-dominated deformation of the lattice cannot fully utilize the load-carrying properties of materials [ 22 , 23 , 24 ]. Additionally, the lattice cores are liable to buckling under compressive loads, while the thick core leads to large spacing between nodes, which weakens the resistance to local panel buckling [ 25 , 26 , 27 ]. Although the development of additive manufacturing has broken the shackles of traditional manufacturing technology and provided opportunities for the production of lattice structures [ 28 , 29 , 30 ], owing to the structural defects and the challenges encountered in traditional manufacturing difficulties, the application of 3D lattice structures in aerospace and aeronautical support structures remains a significant challenge.…”

Section: Introductionmentioning

confidence: 99%

Ant-Inspired Bionic Design Method for the Support Structure of the Fengyun-3 Satellite Payload Infilled with Lattice Structure

Liu

Wang

et al. 2023

Materials

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Owing to their high design freedom and excellent performance, lattice structures have shown outstanding capabilities and great potential in aeronautics and astronautics fields. In this paper, we propose a method to construct lattice structures by parameterizing biological features. An ant-leg configuration is used as the bionic object to generate a bionic lightweight design with a gradient lattice structure. To achieve the above goal, an innovative optimization method combining topology optimization, size optimization, and a bionic lattice structure is proposed in this paper. Taking the support structure of the Fengyun-3 satellite payload as the research object, this optimization method is applied to optimize the design. Further, the reconstructed optimization model and the original model are simulated to evaluate and compare the structural performance. The simulation results show that when combined with bionic lattice structure and structural optimization, the method can achieve the lightweight design goal while ensuring the stiffness and strength of the structure. The results demonstrate that the application of a bionic lattice design in a lightweight design has feasibility and expectable potential.

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“…Dai et al [ 27 ] demonstrated a handheld smartphone fluorescence microscope that can be attached to the smartphone camera for both bright-field and fluorescence imaging at cellular-scale resolutions. Liu et al [ 28 ] proposed a catadioptric microscope objective lens that features an integrated MEMS device for performing biaxial scanning, axial focus adjustment, and control of spherical aberration. In addition, various advances have been made in improving the imaging resolution [ 29 , 30 , 31 ], enhancing the sensitivity of the sensors [ 32 , 33 ].…”

Section: Introductionmentioning

confidence: 99%

Simultaneous Detection of Viability and Concentration of Microalgae Cells Based on Chlorophyll Fluorescence and Bright Field Dual Imaging

Wang

et al. 2021

Micromachines

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Ship ballast water contains high concentration of plankton, bacteria, and other microorganisms. If the huge amount of ballast water is discharged without being inactivated, it will definitely spell disaster to the marine environment. Microalgae is the most common species exiting in ballast water, so the detection of the concentration and viability of microalgae is a very important issue. The traditional methods of detecting microalgae in ballast water were costly and need the help of bulky equipment. Herein, a novel method based on microalgae cell intracellular chlorophyll fluorescence (CF) imaging combines with cell bright field (BF) microscopy was proposed. The geometric features of microalgae cells were obtained by BF image, and the cell viability was obtained by CF image. The two images were fused through the classic image registration algorithm to achieve simultaneous detection of the viability and concentration of microalgae cells. Furthermore, a low-cost, miniaturized CF/BF microscopy imaging prototype system based on the above principles was designed. In order to verify the effectiveness of the proposed method, four typical microalgae in ballast water (Platymonas, Pyramimonas sp., Chrysophyta, and Prorocentrum lima) were selected as the samples. The experimental results show that the self-developed prototype can quickly and accurately determine the concentration and the viability of microalgae cells in ship ballast water based on the dual images of BF and CF, and the detection accuracy is equivalent to that of commercial microscope. It was the first time to simultaneously detect the viability and concentration of microalgae cells in ship ballast water using the method that combining the fluorescence and bright field images; moreover, a miniaturized microscopic imaging prototype was developed. Those findings expected to contribute to the microalgae detection and ship ballast water management.

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MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope

Cited by 22 publications

References 58 publications

High Frequency MEMS Capacitive Mirror for Space Applications

High Frequency MEMS Capacitive Mirror for Space Applications

Ant-Inspired Bionic Design Method for the Support Structure of the Fengyun-3 Satellite Payload Infilled with Lattice Structure

Simultaneous Detection of Viability and Concentration of Microalgae Cells Based on Chlorophyll Fluorescence and Bright Field Dual Imaging

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