MEMS Impinging-Jet Cooling

Abstract

This paper presents an experimental investigation on MEMS impinging jets as applied to micro heat exchangers. We have fabricated MEMS single and array jet nozzles using DRIE technology, as well as a MEMS quartz chip providing a simulated hot surface for jet impingement. The quartz chip, with an integrated polysilicon thin-film heater and distributed temperature sensors, offers high spatial resolution in temperature measurement due to the low thermal conductivity of quartz. From measured temperature distributions, heat transfer coefficients are computed for single and array micro impinging jets using finite element analysis. The results from this study for the first time provide extensive data on spatial distributions of micro impinging-jet heat transfer coefficients, and demonstrate the viability of MEMS heat exchangers that use micro impinging jets.

Experimental investigation of thermal characteristics for a microchannel heat sink subject to an impinging jet, using a micro-thermal sensor array

“…In order to compensate for these disadvantages, many investigators have developed various thermal sensors such as diode sensors and micro-resistive temperature detector (RTD) sensors [15][16][17]. For example, Lin et al [15] developed temperature sensors which are manufactured by using boron-doped polysilicon. However, the fabrication process for such sensors is quite complicated.…”