MEMS-IC Optimization Considering Design Parameters and Manufacturing Variation from both Mechanical and Electrical Side

Yield-aware multi-objective optimization of a MEMS accelerometer system using QMC-based methodologies

“…The accelerometer system used for the demonstration of the mixed-domain yield-aware optimization includes a capacitive sensor which was analytically modeled in [4] and a read-out circuitry based on a transimpedance amplifier [10]. Due to the different domains in the system, the MEMS sensor performance evaluations and the electrical simulations of the read-out circuitry are carried out separately.…”

“…In [8][9], even though the co-optimization of the mixed-domain MEMS has been carried out, process variations have not been taken into account. The mixed-domain MEMS co-optimization together with yield optimization has been addressed in [10]. A VerilogA circuit-level model of the capacitive MEMS accelerometer is used to enable fast evaluation and ease integration into the electrical simulator.…”

“…This paper presents a novel multi-objective yield-aware optimization methodology that realizes the co-optimization of the MEMS sensor and the read-out circuitry for both optimal and robust mixed-domain system performance. Unlike the approach in [10], it is not intended for yield optimization of an initial design, but for global design of hundreds of robust solutions, exhibiting the best trade-offs between different performances and with a reduced impact of process variations. The feasibility of the proposed approach is demonstrated by two-and three-dimensional optimizations of a capacitive MEMS accelerometer system.…”