MEMS Hall effect pressure sensor

Yu, Huiyang; Qin, Ming; Nie, Meng

doi:10.1049/el.2011.4052

Cited by 5 publications

(1 citation statement)

References 9 publications

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“…An electromagnetism and mechanical model is developed in [12] to design the microfabricated pressure sensor. A novel micromachined pressure sensor has also been reported in [13] in which the sensor works based on the Hall effect principle. Boero et al [14] describe the performance of magnetic field resolution using microfabrication technology and application of a micrometer-sized Hall effect devices.…”

Section: Introductionmentioning

confidence: 99%

Design and Analysis of Hall Effect Probe-Based Pressure Transmitter Using Bellows as Sensor

Rajita

Banerjee

Mandal

et al. 2015

IEEE Trans. Instrum. Meas.

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Bellows is an elastic-type pressure sensor used as a local indicator in industry. Transmission of bellows reading to a remote location in control room is very important in pressure measurement and control system in industry. In this paper, the design of a noncontact pressure transducer along with a transmitting unit using bellows as the primary sensing element and a Hall sensor as secondary sensing element has been described. The theoretical equations describing the operation of the proposed transducer and transmitter have been derived. The function of the transducer and transmitter has been experimentally tested and the experimental results are reported in the paper. Both transducer and transmitter characteristics have been found to be linear with good repeatability. The graphical abstract is shown in Fig. 1.Index Terms-Bellows, Hall sensor, noncontact technique, pressure transducer, pressure transmitter.

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Section: Introductionmentioning

confidence: 99%