MEMS generator of power harvesting by vibrations using piezoelectric cantilever beam with digitate electrode

Lee, Bor-Shun; He, Jyun-Jhang; Wu, Wen-Jong; Shih, Wen‐Pin

doi:10.1117/12.658584

Cited by 10 publications

(4 citation statements)

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“…In a study performed by Lee et al (2006), a novel fabrication technique was developed in order to create a piezoelectric MEMS power harvesting device with interdigitated electrodes operating in the −33 bending mode. The process was developed to help reduce the fabrication time and increase the quality of the piezoelectric device compared to existing techniques.…”

Section: Power Harvesting In Microelectromechanical Systemsmentioning

confidence: 99%

A review of power harvesting using piezoelectric materials (2003–2006)

Anton¹,

Sodano²

2007

Smart Mater. Struct.

2,318

1,265

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The field of power harvesting has experienced significant growth over the past few years due to the ever-increasing desire to produce portable and wireless electronics with extended lifespans. Current portable and wireless devices must be designed to include electrochemical batteries as the power source. The use of batteries can be troublesome due to their limited lifespan, thus necessitating their periodic replacement. In the case of wireless sensors that are to be placed in remote locations, the sensor must be easily accessible or of a disposable nature to allow the device to function over extended periods of time. Energy scavenging devices are designed to capture the ambient energy surrounding the electronics and convert it into usable electrical energy. The concept of power harvesting works towards developing self-powered devices that do not require replaceable power supplies. A number of sources of harvestable ambient energy exist, including waste heat, vibration, electromagnetic waves, wind, flowing water, and solar energy. While each of these sources of energy can be effectively used to power remote sensors, the structural and biological communities have placed an emphasis on scavenging vibrational energy with piezoelectric materials. This article will review recent literature in the field of power harvesting and present the current state of power harvesting in its drive to create completely self-powered devices.

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Section: Power Harvesting In Microelectromechanical Systemsmentioning

confidence: 99%

A review of power harvesting using piezoelectric materials (2003–2006)

Anton¹,

Sodano²

2007

Smart Mater. Struct.

2,318

1,265

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“…Among these, lead zirconate titanate(PZT) is the most convenient one. The research done by Lee et al [1] shows that PZT is vulnerable to create fatigue crack and then happen brittle fracture under high frequency cycle load. PVDF is a alternative convenient piezoelectric material.…”

Section: Review On Piezoelectric Harvesting Technologymentioning

confidence: 99%

On Piezoelectric Harvesting Technology

Shang

Tao

et al. 2012

AMR

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In recent years, significant progress has been made with in-deep application of piezoelectric harvesting energy technology. To make the technology development more convenient, a comprehensive review on application of piezoelectric harvesting technology is made in the paper. Piezoelectric harvesting devices as power source from vibration, human motion and so on are expounded. The technology would bring fast increasing in systems of micro wireless sensor, integrated systems and self-power MEMS.

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“…A variety of piezoelectric energy harvesters has been presented to scavenge electrical energy from environment vibration [4][5][6][7][8]. The piezoelectric energy harvester can be also implemented with micro-electro-mechanical systems (MEMS) technology [9,10].…”

Section: Introductionmentioning

confidence: 99%

Experiment and analysis of a piezoelectric energy harvester based on combined FEM modeling and spice simulation

et al. 2022

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This paper presents modeling and simulation of a cantilever-type piezoelectric energy harvester based on a combined FEM (Finite Element Method) and spice circuit. The PEH having dimension of 61 mm x 37 mm x 0.4 mm provides the maximum output power of 8 mW at resonant frequency of 127 Hz. The fabricated cantilever-type PEH (Piezoelectric Energy Harvester) has been characterized with variable resistor, which reveals that maximum power transfer is achieved at 10 k. The modeling and simulation have beenperformed to study the effect of piezoelectric layer thickness on PEH output power in case of load resistance. FEM modeling and simulations have been carried out to extract electrical elements such as Rm, Lm, Cm, Cp and Γ. Those electrical elements have been included into a spice model to find optimal load resistance for maximum power transfer as well as . frequency response as function of piezoelectric layer thickness. Experiment and simulation show a good agreement on optimal load resistance.

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MEMS generator of power harvesting by vibrations using piezoelectric cantilever beam with digitate electrode

Cited by 10 publications

References 0 publications

A review of power harvesting using piezoelectric materials (2003–2006)

A review of power harvesting using piezoelectric materials (2003–2006)

On Piezoelectric Harvesting Technology

Experiment and analysis of a piezoelectric energy harvester based on combined FEM modeling and spice simulation

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