MEMS Gas Flow Sensor Based on Thermally Induced Cantilever Resonance Frequency Shift

Blue, Robert; Brown, James Gordon; Li, Lijie; Bauer, Ralf; Uttamchandani, Deepak

doi:10.1109/jsen.2020.2964323

Cited by 7 publications

(1 citation statement)

References 24 publications

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“…Micro-size gas flow sensors can be divided into two categories in terms of working principle: thermal and non-thermal style [1] . The thermal style gas flow sensors have been widely studied and applied due to their simple structure with no moving parts, and mature processing technology [2][3][4] . Some foreign research institutions and technology companies have conducted extensive research on the thermal style gas flow sensors, and many sensors using different processing techniques and materials have been proposed [5][6][7][8][9][10] .…”

Section: Introductionmentioning

confidence: 99%

Research on a natural gas flow sensor based on MEMS technology

Zhou¹,

Sun²,

Zheng

et al. 2023

Second International Conference on Advanced Manufacturing Technology and Manufacturing Systems (ICAMTMS 2023)

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The primary task of establishing an intelligent energy network is to achieve the intelligent measurement of energy sources such as water, electricity, and natural gas, etc. Among them, significant progress has been made in the intelligent measurement of electricity and water, but the intelligent measurement of natural gas is still an urgent technical problem to be solved. At present, the actually used gas flow meters in the market are still traditional mechanical gas meters, which require manually recording gas meter data in each household. The data cannot be connected to the internet and cannot collect instantaneous flow values in real time, which is not conducive to real-time peak shaving of the energy network and compatibility with national intelligent energy network projects. The MEMS gas flow sensor studied in this article has the advantages of small size, light weight, low power consumption, high reliability, high sensitivity, and easy integration, which is a highly promising technical means to solve the intelligent measurement of natural gas.

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Section: Introductionmentioning

confidence: 99%

Research on a natural gas flow sensor based on MEMS technology

Zhou¹,

Sun²,

Zheng

et al. 2023

Second International Conference on Advanced Manufacturing Technology and Manufacturing Systems (ICAMTMS 2023)

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Si-based MEMS resonant sensor: A review from microfabrication perspective

Verma

Mondal

Gupta

2021

Microelectronics Journal

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With the technological advancement in micro-electro-mechanical systems (MEMS), microfabrication processes along with digital electronics together have opened novel avenues to the development of small-scale smart sensing devices capable of improved sensitivity with a lower cost of fabrication and relatively small power consumption. This article aims to provide the overview of the recent work carried out on the fabrication methodologies adopted to develop silicon based resonant sensors. A detailed discussion has been carried out to understand critical steps involved in the fabrication of the silicon-based MEMS resonator. Some challenges starting from the materials selection to the final phase of obtaining a compact MEMS resonator device for its fabrication have also been explored critically.

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