Mems force sensor array for evaluating the contractility of IPS cell-derived cardiomyocytes

Matsudaira, Kenei; Nguyen, Thanh-Vinh; Shoji, Kayoko Hirayama; Tsukagoshi, Takuya; Takahata, Tomoyuki; Shimoyama, Isao

doi:10.1109/transducers.2017.7993981

Cited by 1 publication

(2 citation statements)

References 7 publications

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“…Under the same exciting voltage, the 270 μm-long probe has a larger deformation and can provide a large force range from 1.05 μN to 16.52 μN, while the probe of 200 μm-long can produce a smaller force down to 9.33 nN. The minimum force produced by the probe is lower than other cantilevers used for Nano-scale Mechanical test [27,28], and the probe has a sufficient large detection range. The lower detection limit and wide detection range make the probe suitable for microbiology [27][28][29] and various nanomaterial science [7,22].…”

Section: Resultsmentioning

confidence: 95%

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A novel scanning force microscopy probe with thermal-electrical actuation and piezo-resistive sensing

Liu

Wang

Zhu

et al. 2018

J. Micromech. Microeng.

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This work presents a novel scanning force microscopy probe with electro-thermal actuation and piezo-resistive detection. The fabricated probe of 270 × 58 × 2.5 μm3 can generate a force between 1.05 μN and 16.52 μN with a resolution of nano-newton, and can detect the nanometer-scale deflection. The minimum detectable output signal of the probe could be down to 20 μV and the sensitivity reaches 4.92 mV μm−1. This is a straight-forward technique for characterizing the mechanical properties of micro/nano-structures and devices.

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Section: Resultsmentioning

confidence: 95%

“…The minimum force produced by the probe is lower than other cantilevers used for Nano-scale Mechanical test [27,28], and the probe has a sufficient large detection range. The lower detection limit and wide detection range make the probe suitable for microbiology [27][28][29] and various nanomaterial science [7,22].…”

Section: Resultsmentioning

confidence: 99%