Eurosensors 2018 2018
DOI: 10.3390/proceedings2130837
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MEMS Enabled Bendable and Stretchable Silicon Circuits

Abstract: We report the design and implementation of a unique, wafer sized stretchable and bendable monolithic silicon matrix structure. The achieved stretchability allows for simultaneous omnidirectional folding, required to conform the structure to complex curved 3D surfaces. Moreover, it also enables dynamic mechanical deformation of the structure to cope with a moving environment, like e.g., the wall of the heart muscle. Due to the nature of the fabrication process, normal silicon wafer processing can be performed p… Show more

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Cited by 2 publications
(1 citation statement)
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“…Moreover, the asymmetry from the serpentine spring skeleton allows the structure to move with two different modes: by inertial swimming at the interface or coasting near a bottom surface. Serpentine spring structures are well known in the MEMS field to create flexible structures by working with microfabrication techniques (75,76). Although serpentine springs have been implemented in untethered micro-force sensing microrobots to obtain compliant structures (77), such structures have not been included before in a soft robotic living system.…”
Section: Discussionmentioning
confidence: 99%
“…Moreover, the asymmetry from the serpentine spring skeleton allows the structure to move with two different modes: by inertial swimming at the interface or coasting near a bottom surface. Serpentine spring structures are well known in the MEMS field to create flexible structures by working with microfabrication techniques (75,76). Although serpentine springs have been implemented in untethered micro-force sensing microrobots to obtain compliant structures (77), such structures have not been included before in a soft robotic living system.…”
Section: Discussionmentioning
confidence: 99%