International Test Conference, 2003. Proceedings. ITC 2003.
DOI: 10.1109/test.2003.1270897
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Mems design and verification

Abstract: The long term impact of MEMS technology will be in its ability to integrate novel sensing and actuation functionality on traditional computing and communication devices enabling the ubiquitous digital computer to interact with the world around it. The design and verification of such integrated systems will occur at the system level, driven primarily by the application. Application-driven systemlevel design methodologies that ease the integration of the digital domain to the real world using mixed domain techno… Show more

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Cited by 9 publications
(5 citation statements)
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“…However, the design rules that need to be checked in the microfluidics-based biochips are significantly different from those in circuit area. They are also unlike classical MEMS due to the fluidic domain [56]. The determination of accurate and efficient design rules for the physical verification of digital microfluidics-based biochips remains an open problem.…”
Section: Challengesmentioning
confidence: 99%
“…However, the design rules that need to be checked in the microfluidics-based biochips are significantly different from those in circuit area. They are also unlike classical MEMS due to the fluidic domain [56]. The determination of accurate and efficient design rules for the physical verification of digital microfluidics-based biochips remains an open problem.…”
Section: Challengesmentioning
confidence: 99%
“…based on existing digital and analogue design methodologies (Mukherjee & Fedder, 1998) as well as adapting them from other domains. Literature regarding the design of microdevices is usually focused on specific applications types, such as MEMS (Microelectromechanical Systems) (Mukherjee & Fedder, 1997;Fedder, 1999;Swart, 1999;Baidya, Gupta & Mukherjee, 2002;Mukherjee, 2003;McCorquodale et al, 2003), or robotic micro devices (Havlik & Carbone, 2006); on particular devices, e.g. air vehicle (Conn, Burgess & Ling, 2007); or on part of the design process (Bunyan & Ward, 1997) and the tools and techniques used within it (Karam et al, 1997;Senturia, 1998;Gobinath, Cecil, & Powell, 2007).…”
Section: Introduction and Relevant Researchmentioning
confidence: 99%
“…These applications have focussed on the electromechanical optimization of material layout. Inclusion of conditioning circuit details, multiple physics, and manufacturing considerations is not straightforward, and a systematic, multi-level approach is desired according to Senturia (2001); Mukherjee (2003); Leondes (2006). MDO coordination methods have originally been developed to address similar challenges in the macro world, and may therefore also be useful in the context of multidisciplinary microsystem design.…”
Section: Introductionmentioning
confidence: 99%