MEMS deformable mirrors for astronomical adaptive optics

Cornelissen, Steven; Hartzell, Allyson L.; Stewart, Jason B.; Bifano, Thomas G.; Bierden, Paul

doi:10.1117/12.857296

Cited by 25 publications

(23 citation statements)

References 15 publications

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“…The optical design is superimposed to the CAD view in the Figure 6. The blue box is the MIRA board, which dimensions are 10 x 10.5 x 2.5 cm 3 . The area of mechanical conflict is shown.…”

Section: E Mechanical Designsmentioning

confidence: 99%

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Optical MEMS for Earth observation

Liotard

Viard

Noell

et al. 2017

International Conference on Space Optics — ICSO 2012

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-Due to the relatively large number of optical Earth Observation missions at ESA, this area is interesting for new space technology developments. In addition to their compactness, scalability and specific task customization, optical MEMS could generate new functions not available with current technologies and are thus candidates for the design of future space instruments. Most mature components for space applications are the digital mirror arrays, the micro-deformable mirrors, the programmable micro diffraction gratings and tiltable micromirrors. A first selection of market-pull and techno-push concepts is done. In addition, some concepts are coming from outside Earth Observation. Finally two concepts are more deeply analyzed.The first concept is a programmable slit for straylight control for space spectro-imagers. This instrument is a push-broom spectroimager for which some images cannot be exploited because of bright sources in the field-of-view. The proposed concept consists in replacing the current entrance spectrometer slit by an active row of micro-mirrors. The MEMS will permit to dynamically remove the bright sources and then to obtain a field-of-view with an optically enhanced signal-to-noise ratio.The second concept is a push-broom imager for which the acquired spectrum can be tuned by optical MEMS. This system is composed of two diffractive elements and a digital mirror array. The first diffractive element spreads the spectrum. A micromirror array is set at the location of the spectral focal plane. By putting the micro-mirrors ON or OFF, we can select parts of field-of-view or spectrum. The second diffractive element then recombines the light on a push-broom detector. Dichroics filters, strip filter, band-pass filter could be replaced by a unique instrument.

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“…The optical design is superimposed to the CAD view in the Figure 6. The blue box is the MIRA board, which dimensions are 10 x 10.5 x 2.5 cm 3 . The area of mechanical conflict is shown.…”

Section: E Mechanical Designsmentioning

confidence: 99%

“…Boston Micromachines Corporation (BMC) [3] produces the most advanced MEMS deformable mirrors. Their main parameters are approaching the requirements values, i.e.…”

Section: A Presentation Of Main Optical Memsmentioning

confidence: 99%

Optical MEMS for Earth observation

Liotard

Viard

Noell

et al. 2017

International Conference on Space Optics — ICSO 2012

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“…For adaptive optics application, the wavefront has to be properly sampled, increasing the number of actuators for a given number of modes to be corrected. Third, the surface micro-machined continuous-membrane deformable mirror made by Boston Micromachines Corporation (BMC) is based on a single compliant optical membrane supported by multiple attachments to an underlying array of surface-normal electrostatic actuators 7 . The efficiency of this device has been demonstrated recently in several AO system, including the GPI instrument on Gemini telescope.…”

Section: Deformable Mirrorsmentioning

confidence: 99%

MOEMS deformable mirror testing in cryo for future optical instrumentation

et al. 2017

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MOEMS Deformable Mirrors (DM) are key components for next generation optical instruments implementing innovative adaptive optics systems, in existing telescopes as well as in the future ELTs. Due to the wide variety of applications, these DMs must perform at room temperature as well as in cryogenic and vacuum environment. Ideally, the MOEMS-DMs must be designed to operate in such environment. This is unfortunately usually not the case. We will present some major rules for designing / operating DMs in cryo and vacuum. Next step is to characterize with high accuracy the different DM candidates. We chose to use interferometry for the full characterization of these devices, including surface quality measurement in static and dynamical modes, at ambient and in vacuum/cryo. Thanks to our previous set-up developments, we are placing a compact cryo-vacuum chamber designed for reaching 10-6 mbar and 160K, in front of our custom Michelson interferometer, able to measure performances of the DM at actuator/segment level as well as whole mirror level, with a lateral resolution of 2µm and a sub-nanometric zresolution. Using this interferometric bench, we tested the PTT 111 DM from Iris AO: this unique and robust design uses an array of single crystalline silicon hexagonal mirrors with a pitch of 606µm, able to move in tip, tilt and piston with strokes from 5 to 7µm, and tilt angle in the range of +/-5mrad. They exhibit typically an open-loop flat surface figure as good as < 20nm rms. A specific mount including electronic and opto-mechanical interfaces has been designed for fitting in the test chamber. Segment deformation, mirror shaping, open-loop operation are tested at room and cryo temperature and results are compared. The device could be operated successfully at 160K. An additional, mainly focus-like, 500 nm deformation is measured at 160K; we were able to recover the best flat in cryo by correcting the focus and local tip-tilts on some segments. Tests on DM with different mirror thicknesses (25µm and 50µm) and different coatings (silver and gold) are currently under way. Finally, the goal of these studies is to test DMs in cryo and vacuum conditions as well as to improve their architecture for staying efficient in harsh environment.

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“…Boston Micromachines Corporation (BMC) [8] produces the most advanced MEMS deformable mirrors. Their main parameters are approaching the requirements values, i.e.…”

Section: Micro-deformable Mirrorsmentioning

confidence: 99%

MOEMs-based new functionalities for future instrumentation in space

Zamkotsian

Liotard

Viard

et al. 2017

International Conference on Space Optics — ICSO 2012

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-Micro-Opto-Electro-Mechanical Systems (MOEMS) could be key components in future generation of space instruments. In Earth Observation, Universe Observation and Planet Exploration, scientific return of the instruments must be optimized in future missions. MOEMS devices are based on the mature micro-electronics technology and in addition to their compactness, scalability, and specific task customization, they could generate new functions not available with current technologies. CNES has initiated a study with LAM and TAS for listing the new functions associated with several types of MEMS (programmable slits, programmable micro-diffraction gratings, micro-deformable mirrors). Instrumental applications are then derived and promising concepts are described.

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MEMS deformable mirrors for astronomical adaptive optics

Cited by 25 publications

References 15 publications

Optical MEMS for Earth observation

Optical MEMS for Earth observation

MOEMS deformable mirror testing in cryo for future optical instrumentation

MOEMs-based new functionalities for future instrumentation in space

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