MEMS components with perfectly protected edges and corners in Si{110} wafers

Abstract

In this paper, we report a fabrication method for the formation of microelectromechanical systems (MEMS) structures with perfectly protected edges and corners in {llO}Si wafers using complementary metal oxide semiconductor (CMOS) compatible tetramethyl ammonium hydroxide (TMAH) solution. Fabrication method includes two-steps wet etching. The second step of etching is carried out after mask inversion from silicon nitride (Si3N4) to silicon dioxide (Si02) by local oxidation of silicon (LOCOS) followed by nitride etching. Mask design methodology for the various shapes microstructures whose edges aligned along different directions is briefly discussed.