MEMS capacitive flow sensor for natural gas pipelines

Nguyen, Son Duy; Paprotny, Igor; Wright, Paul K.; White, Richard M.

doi:10.1016/j.sna.2014.10.013

Cited by 41 publications

(19 citation statements)

References 20 publications

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“…Determination of flow velocity and direction in harsh environments is a major concern in various applications, such as gas flow measurement in pipelines [1], meteorology [2], agricultural production [3], avionics [4] and active flow control in aviation [5], intelligent air-conditioning systems [6,7], and wind turbine installations [8]. Flow sensors also find critical applications in biomedical fields, for example, installation in external ventricular drains [9], tracheal intubation flow sensing [10], sleep apnea monitoring [11], and blood flow sensing [12].…”

Section: Introductionmentioning

confidence: 99%

Design and Evaluation of a Multidirectional Thermal Flow Sensor on Flexible Substrate

et al. 2019

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The development and the corresponding evaluation of a multidirectional thermal flow sensor are presented in this work. The sensor was fabricated on a flexible substrate, allowing for new applications, since it provides the possibility of installation in nonplanar surfaces such as pipelines. Furthermore, the sensing elements are not in direct contact with the fluid, which increases the device reliability, extends its application range, and allows the noncontact monitoring of fluids. This was achieved by utilizing the substrate as a protective layer between the sensing elements and the fluid under measurement. The operation principle is based on the determination of the flow-induced temperature profile variations. A dedicated experimental setup was designed and used for the device evaluation. Both flow velocity value and direction were successfully extracted, while the results were consistent with the predicted theoretical values. A single-layer back propagation neural network that correlates the sensors’ readouts to the angle of rotation was implemented, which leads to a mean absolute direction estimation error in the order of 2.7 degrees independent to the training procedure datasets.

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Section: Introductionmentioning

confidence: 99%

Design and Evaluation of a Multidirectional Thermal Flow Sensor on Flexible Substrate

et al. 2019

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“…The use of these transducers could not only improve the efficiency of systems but also predict possible failures due to hostile conditions 3 . For instance, in pipeline systems, gas flow sensors, strain sensors, and pressure sensors are required to measure the pressure level, monitor pipeline cracks, as well as detect gas leakage 4 . Additionally, in industries involving fuel combustion such as aerospace and automotive systems, temperature and pressure sensors are vital devices in the feedback control to enhance the performance of engines 5 6 .…”

mentioning

confidence: 99%

Piezoresistive effect in p-type 3C-SiC at high temperatures characterized using Joule heating

Phan

Dinh

Kozeki

et al. 2016

Sci Rep

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Cubic silicon carbide is a promising material for Micro Electro Mechanical Systems (MEMS) applications in harsh environ-ments and bioapplications thanks to its large band gap, chemical inertness, excellent corrosion tolerance and capability of growth on a Si substrate. This paper reports the piezoresistive effect of p-type single crystalline 3C-SiC characterized at high temperatures, using an in situ measurement method. The experimental results show that the highly doped p-type 3C-SiC possesses a relatively stable gauge factor of approximately 25 to 28 at temperatures varying from 300 K to 573 K. The in situ method proposed in this study also demonstrated that, the combination of the piezoresistive and thermoresistive effects can increase the gauge factor of p-type 3C-SiC to approximately 20% at 573 K. The increase in gauge factor based on the combination of these phenomena could enhance the sensitivity of SiC based MEMS mechanical sensors.

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“…In order to measure the mass and gain additional information about whether rock or float dust is accumulating, as well as identify the level of accumulation for reconditioning /cleaning off the accumulated dust, a mass sensor that weighs the accumulating stack is needed. The new mass sensor uses a modified design based on this group's previously fabricated MEMS capacitive in-line flow sensors [4]. The mass sensor uses the displacement of a paddle caused by the weight of the deposited coal and rock dust to induce a capacitance change between two ports of the sensor.…”

Section: Capacitive Mass Sensormentioning

confidence: 99%

Wireless sensors for automated control of total incombustible content (TIC) of dust deposited in underground coal mines

et al. 2015

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This paper presents ongoing research towards a low-cost/low-power wirelessly enabled distributed sensing system that can be placed throughout underground coal mines to potentially measure the total incombustible content (TIC) of the deposited dust. Underground coal mining operations produce finely divided coal dust, called float dust, which deposits throughout the mine. This combustible material can be feedstock for coal dust explosions. In the U.S., Mine Safety and Health Administration (MSHA) standard 23789 dictates that a TIC of 80% or above has to be maintained in coal mine return airways. However, current best practices for collection TIC measurements involve manual sampling and laboratory procedures. In this work, we describe work towards developing a new wireless sensor network (WSN) consisting of low-cost/low-power sensor modules that use a variety of optical and microfabricated sensors to continuously monitor the TIC of the accumulated dust. The information is then transmitted off-board through a reliable ad-hoc wireless network. Called Sensors for Automated Control of Coal Dust (SACCD), this system can potentially, for example, be used to automate the control of rock-dusting equipment to maintain TIC at acceptable levels.

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MEMS capacitive flow sensor for natural gas pipelines

Cited by 41 publications

References 20 publications

Design and Evaluation of a Multidirectional Thermal Flow Sensor on Flexible Substrate

Design and Evaluation of a Multidirectional Thermal Flow Sensor on Flexible Substrate

Piezoresistive effect in p-type 3C-SiC at high temperatures characterized using Joule heating

Wireless sensors for automated control of total incombustible content (TIC) of dust deposited in underground coal mines

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