MEMS-Based Thermoelectric–Photoelectric Integrated Power Generator

Yan, Jiabin; Liao, Xiaoping; Ji, Sichao; Zhang, Sen

doi:10.1109/jmems.2018.2883707

Cited by 31 publications

(20 citation statements)

References 11 publications

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“…The hybrid energy harvesting has the advantage of higher energy output. As shown in Figure 8e, thermoelectric-photoelectric integrated energy harvester was put forward which can reach a higher energy density compared to traditional energy harvesters based on a single scavenging principle [138]. [137].…”

Section: Mems Energy Harvestingmentioning

confidence: 99%

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Development Trends and Perspectives of Future Sensors and MEMS/NEMS

et al. 2019

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With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings’ manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.

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Section: Mems Energy Harvestingmentioning

confidence: 99%

“…(e) Hybrid energy harvester with the piezoelectric and electromagnetic mechanism. Adapted with permission from Yan et al [138].…”

Section: Mems Energy Harvestingmentioning

confidence: 99%

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

et al. 2019

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“…Technological innovations have unleashed the power of renewable energies such as wind, hydro, solar, and geothermal. Over the past few years, a series of energy conversion technologies, such as tidal power generators, thermoelectric generators, photoelectric generators, and wind turbine generators, have been developed [1][2][3][4]. In 2012, the triboelectric nanogenerator (TENG) was reported by the Wang group, which is based on the integration of triboelectrification and an electrostatic induction mechanism and has drawn the attention of researchers in many research fields due to its simple preparation, high electrical output, low-cost raw materials, and great application potential [5][6][7][8][9][10][11][12].…”

Section: Introductionmentioning

confidence: 99%

A Novel Triboelectric Material Based on Deciduous Leaf for Energy Harvesting

et al. 2021

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Recently, the triboelectric nanogenerator (TENG) for harvesting low-frequency energy has attracted the attention of academia. However, there are few studies on environmentally friendly triboelectric materials. Here, we propose a novel triboelectric nanogenerator based on the deciduous leaf (DL-TENG) that can harvest mechanical energy from various low-frequency motions. The deciduous leaf is an environmentally friendly triboelectric material, which has a low-cost and is easy to obtain. Using it to generate electricity can achieve the effect of waste utilization. From the experimental results, the peak value of the short-circuit current (Isc) and the open-circuit voltage (Voc) can reach 4.2 µA and 150 V, respectively. The fabricated DL-TENG exhibits a stable high performance, with a maximum output power of 72.2 µW, to a load of 20 MΩ. Moreover, we also designed a stacked structure, DL-TENG, to enhance the electrical output. Additionally, the stacked DL-TENG could drive 15 commercial light-emitting diodes (LEDs). This design will promote the development of low-cost and environmentally friendly triboelectric material.

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“…[12] A device converting thermal energy into electrical energy is known as a micro thermoelectric harvester, or microthermoelectric generator(μTEG). [13][14][15][16][17] As shown in Figure 1, the basic principle of a thermoelectric harvester is the Seebeck effect. [18] A thermoelectric harvester is usually fabricated with two different materials like polysilicon and metal (gold).…”

Section: Introductionmentioning

confidence: 99%

Research on Micro‐Electro‐Mechanical System‐Based Integrated Energy Harvester with Test Structures

Zhang

Liao

2021

Energy Tech

Self Cite

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Expansion of Internet of Things (IoT) in industrial fields requires a novel power supply. Research on a micro‐electro‐mechanical system (MEMS)‐based integrated energy harvester with test structures for power supply is proposed. The MEMS fabrication process is applied and amended to achieve a better performance. A metal heat sink is fabricated at the center of the harvester for thermoelectric gathering. The photoelectric harvester is in the back of the device to integrate with the thermoelectric harvester. The output voltage factor and output power factor of the thermoelectric harvester are measured to be 0.58 V cm−2 K−1 and 2.76 × 10−2 μW cm−2 K−2. The efficiencies when the photoelectric harvester works with top and bottom sides, respectively, are 5.45% and 0.27%. In addition, several parameter test structures are designed to explain how external and internal parameters affect the performance of the proposed device. The maximum output power factor is found to be related to the length and width of the thermocouple. This relationship provides a way to amend the performance of the proposed device in our further research.

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MEMS-Based Thermoelectric–Photoelectric Integrated Power Generator

Cited by 31 publications

References 11 publications

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

Development Trends and Perspectives of Future Sensors and MEMS/NEMS

A Novel Triboelectric Material Based on Deciduous Leaf for Energy Harvesting

Research on Micro‐Electro‐Mechanical System‐Based Integrated Energy Harvester with Test Structures

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