37th Aerospace Sciences Meeting and Exhibit 1999
DOI: 10.2514/6.1999-521
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MEMS-based probes for velocity and pressure measurements in unsteady and turbulent flowfields

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Cited by 11 publications
(3 citation statements)
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“…Further investigations based on the two aforementioned studies show the application of a fast-response cylinder probe in a centrifugal compressor [6][7][8]. Moreover, Rediniotis et al [9] built a MEMS based fast-response five sensor probe for subsonic measurements, in order to test the angular/spatial and temporal characteristics of the probe with signal frequencies of up to 400 Hz. A flush-mounted sensor experiences high loads, which can be reduced by placing the sensor farther inside the probe.…”
Section: Introductionmentioning
confidence: 99%
“…Further investigations based on the two aforementioned studies show the application of a fast-response cylinder probe in a centrifugal compressor [6][7][8]. Moreover, Rediniotis et al [9] built a MEMS based fast-response five sensor probe for subsonic measurements, in order to test the angular/spatial and temporal characteristics of the probe with signal frequencies of up to 400 Hz. A flush-mounted sensor experiences high loads, which can be reduced by placing the sensor farther inside the probe.…”
Section: Introductionmentioning
confidence: 99%
“…The advent of Micro-Electrical-Mechanical-Systems (MEMS) has the potential to offer smaller sensors and reduce the size of unsteady probes. Rediniotis and Johansen (1998) examined a 5-hole MEMS probe with a diameter of approximately 1 mm, shown in cross-section in Figure 2. This probe includes a semi-spherical cap that is placed over a silicon chip with pressure sensors and was capable of a maximum frequency response of around 400 Hz.…”
Section: Introductionmentioning
confidence: 99%
“…Figure 2. The 5-hole MEMS probe studied by Rediniotis and Johansen (1998). Principles of operation Figure 5 shows a schematic of the novel probe concept.…”
Section: Introductionmentioning
confidence: 99%