MEMS-based microelectrode system incorporating carbon nanotubes for ionization gas sensing

Self‐Organization of a Hybrid Nanostructure consisting of a Nanoneedle and Nanodot

“…The current remains almost zero with the increase of the applied power and then immediately rises up at a voltage when discharge occurs. These distinct breakdown voltages as a function of a specific type of gas can provide a fingerprinting property 24, 25. It is advantageous that our device shows a much lower discharge voltage (less than 30 V) than previously reported ones 24–28.…”

“…These distinct breakdown voltages as a function of a specific type of gas can provide a fingerprinting property 24, 25. It is advantageous that our device shows a much lower discharge voltage (less than 30 V) than previously reported ones 24–28. More sensing measurements against hydrogen concentrations in nitrogen ranging from 10 to 200 ppm have been conducted on the same prototype of nanonipple array.…”

“…Meanwhile, the isolation of the Si/Ga alloy nanodot by the adjacent amorphous silicon layer (hybrid structure) forms an ideal nanocapacitor to collect the charges in the vicinity of it, to further increase the local electrical field 33. In addition, the distance between adjacent hybrid nanonipples can be simply adjusted by changing image pixel size in the FIB system, allowing the minimization of the shielding effect, which is, in general, extremely hard to prevent in normal nanowire‐based ionization gas sensors due to the insufficient distance among the nanowires during their growth or manipulation 24–28…”

Advances in Conceptual Electronic Nanodevices based on 0D and 1D Nanomaterials

“…CNT sensor can operate at room temperature, with smaller size and lower power consumption, so that the core device has longer lifetime. Combining CNT sensor technology together with other advanced technologies, such as Micro-Electro Mechanical Systems (MEMS) [64], wireless communication technology and IC design, etc., will likely bring a revolutionary change in sensing applications.…”

Ordered hybrid nanoneedle arrays for gas sensing

“…These unique properties of field ionization gas sensor are mainly attributed to the scale effect of individual ODNM and their optimized organization. For an individual one-dimensional nanostructure, it has the high aspect ratio that results in a flux convergence effect of electric field (geometry effect), to enable a dramatic reduction of the voltage bias required for gaseous field ionization [22][23][24][25][26][27]. However, even having this scale effect of ODNM, the previous reported field ionization devices still suffer a high operation voltage issue.…”