“…A variety of scanning mechanisms have been employed in distal scanning CLEs, including piezoelectric fiber scanners [10], electromagnetically actuated resonant armature systems [7], and various microelectromechanical system (MEMS) mirrors [11], [12], but scanning MEMS mirrors are drawing the most attention. In past decades, electrostatic [13], [14], [15], [16], piezoelectric [17], [18], electromagnetic [19], and electrothermal [20], [21] MEMS mirrors have been applied to miniaturize confocal microscopes.…”