MEMS-based electrostatically tunable microstrip patch antenna using flexible polyimide film

Goteti, Raghav Venkat; Ramadoss, Ramesh

doi:10.1117/12.606645

Cited by 2 publications

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“…In [4], a MEMS based electrostatically tunable antenna fabricated using microelectronics processing techniques such as thin film deposition is proposed for reflect array applications. In [5], a MEMS based tunable square microstrip patch antenna fabricated on flexible Kapton polyimide film using printed circuit processing techniques is reported by our group. A 6 mm x 6 mm microstrip patch antenna tunable from 18.34 GHz at 0 V to 17.95 GHz at 268 V (with a tuning range of 390 MHz) was reported.…”

Section: Introductionmentioning

confidence: 99%

“…The tuning was achieved by manually adjusting the air gap between the substrate and the ground plane using a spacer. Recently, MEMS based electrostatically tunable microstrip antennas have been reported in [4] [5]. In [4], a MEMS based electrostatically tunable antenna fabricated using microelectronics processing techniques such as thin film deposition is proposed for reflect array applications.…”

Section: Introductionmentioning

confidence: 99%

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MEMS Based Electrostatically Tunable Circular Microstrip Patch Antenna

Jackson

Ramadoss

2006

2006 IEEE Annual Wireless and Microwave Technology Conference

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This paper reports a MEMS based electrostatically tunable circular microstrip patch antenna fabricated using printed circuit processing techniques. The microstrip patch antenna is patterned on the top side of a Kapton polyimide film which is suspended above the ground plane. The resonant frequency of the antenna is tuned electrostatically by applying a DC bias voltage between the patch and the ground plane. The movable patch deflects downward toward the fixed ground plane due to the electrostatic force of attraction caused by the applied DC bias voltage. This deflection decreases the air gap thereby increasing the effective permittivity of the antenna. This increase in effective permittivity results in a downward shift in the resonant frequency. The patch is inductively coupled to a coplanar waveguide (CPW) feed line via a slot in the ground plane. A 6 mm diameter circular patch antenna tunable from 16.91 GHz at 0 V to 16.64 GHz at 165 V, a tuning range of 270 MHz, is presented in this paper.

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Section: Introductionmentioning

confidence: 99%