2014
DOI: 10.3997/2214-4609.20141244
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MEMS-based Accelerometers - The Quest for Low Frequencies and Weak Signals

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“…Accelerometers used as seismic sensors must have a high dynamic range and low self-noise (Goujon et al 2012). Seismic MEMS sensors are limited by Brownian noise and electronic flicker noise that primarily affects frequencies below 10 Hz (Moreau, Lainé and Serrut 2014;Tellier and Lainé 2017). In order to achieve the desired performance, MEMS accelerometers are often constructed with a force-feedback loop and the proof mass is placed in a vacuum to minimise noise generated from viscous gas damping (Lainé and Mougenot 2014;Paulson, Husom and Goujon 2015a).…”
Section: Introductionmentioning
confidence: 99%
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“…Accelerometers used as seismic sensors must have a high dynamic range and low self-noise (Goujon et al 2012). Seismic MEMS sensors are limited by Brownian noise and electronic flicker noise that primarily affects frequencies below 10 Hz (Moreau, Lainé and Serrut 2014;Tellier and Lainé 2017). In order to achieve the desired performance, MEMS accelerometers are often constructed with a force-feedback loop and the proof mass is placed in a vacuum to minimise noise generated from viscous gas damping (Lainé and Mougenot 2014;Paulson, Husom and Goujon 2015a).…”
Section: Introductionmentioning
confidence: 99%
“…Quantifying sensor noise in the field is challenging because environmental noise often masks the sensor self-noise. Accelerometers are typically taken to ultra-low noise test facilities in order to measure the sensor self-noise (Hewlett-Packard Development Company 2011; Lainé and Mougenot 2014;Moreau et al 2014). Such measurements are suitable for quantifying the sensor noise floor, but they cannot be duplicated during a seismic acquisition project.…”
Section: Introductionmentioning
confidence: 99%