MEMS at Bosch — Invented for life

Laermer, Franz

doi:10.1109/memsys.2018.8346528

Cited by 4 publications

(3 citation statements)

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“…The contact angles calculated from the Wenzel and Cassie-Baxter equations are The obtained nano and microchannels were measured using a confocal microscope model Sensofar PLU neox with a 10XDI objective to evaluate the accuracy on the sub-micron range depth. Furthermore, the surface roughness was evaluated using an optical zoom 4X in an area of 317.06 x 237.38 µm 2 . The channel template of Figure 1a was manufactured three times.…”

Section: Methodsmentioning

confidence: 99%

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Cost-effective microfabrication of sub-micron-depth channels by femto-laser anti-stiction texturing

et al. 2020

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Micro Electro Mechanical Systems (MEMS) and microfluidic devices have found numerous applications in the industrial sector. However, they require a fast, cost-effective and reliable manufacturing process in order to compete with the conventional methods. Particularly, at the sub-micron scale, the manufacturing od devices are limited by the dimensional complexity. A proper bonding and stiction prevention of these sub-micron channels are two of the main challenges faced during the fabrication process of low aspect ratio channels. Especially, in case of using flexible materials such as polydimethylsiloxane (PDMS). This study presents a direct laser microfabrication method of sub-micron channels using an infrared (IR) ultrashort pulse (femtoseconds) capable of manufacturing extremely low aspect ratio channels. These microchannels are manufactured and tested varying their depth from 0.5 µm to 2 µm and width of 15, 20, 25, and 30 µm. The roughness of each pattern was measured by an interferometric microscope. Additionally, the static contact angle of each depth was studied to evaluate the influence of femtosecond laser fabrication method on the wettability of the glass substrate. PDMS, which is a biocompatible polymer, was used to provide a watertight property to the sub-micron channels and also to assist the assembly of external microfluidic hose connections. A 750nm depth watertight channel was built using this methodology and successfully used as a blood plasma separator (BPS). The device was able to achieve 100% pure plasma without stiction of the PDMS layer to the sub-micron channel within an adequate time. This method provides a novel manufacturing approach useful for various applications such as point-of-care devices.

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Section: Methodsmentioning

confidence: 99%

“…The fast improvement of MEMS and microfluidics during the last decade has allowed the development of new research areas [1] [2]. Currently, this research has consolidated on new devices that require cost-effective and reliable manufacturing processes.…”

Section: Introductionmentioning

confidence: 99%

Cost-effective microfabrication of sub-micron-depth channels by femto-laser anti-stiction texturing

et al. 2020

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“…For commercial MEMS devices, to date, they are composed of either nonmoving parts or suspended beams of which the motion is very restricted . Therefore, novel alternative approach to reduce friction and wear for dry contacts is needed for the MEMS area of which the market is about 12 billion dollars in 2018 …”

Section: Introductionmentioning

confidence: 99%

Structural Superlubricity Based on Crystalline Materials

Song

et al. 2019

Small

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The ORCID identification number(s) for the author(s) of this article can be found under https://doi.org/10.1002/smll.201903018.Herein, structural superlubricity, a fascinating phenomenon where the friction is ultralow due to the lateral interaction cancellation resulted from incommensurate contact crystalline surfaces, is reviewed. Various kinds of nano-and microscale materials such as 2D materials, metals, and compounds are used for the fabrication. For homogeneous frictional pairs, superlow friction forces exist in most relative orientations with incommensurate configuration. Heterojunctions bear no resemblance to homogeneous contact, since the lattice constants are naturally mismatched which leads to a robust structural superlubricity with any orientation of the two different surfaces. A discussion on the perspectives of this field is also provided to meet the existing challenges and chart the future. www.advancedsciencenews.com

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Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

Han,

Huang,

et al. 2023

Microsyst Nanoeng

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Pressure sensors play a vital role in aerospace, automotive, medical, and consumer electronics. Although microelectromechanical system (MEMS)-based pressure sensors have been widely used for decades, new trends in pressure sensors, including higher sensitivity, higher accuracy, better multifunctionality, smaller chip size, and smaller package size, have recently emerged. The demand for performance upgradation has led to breakthroughs in sensor materials, design, fabrication, and packaging methods, which have emerged frequently in recent decades. This paper reviews common new trends in MEMS pressure sensors, including minute differential pressure sensors (MDPSs), resonant pressure sensors (RPSs), integrated pressure sensors, miniaturized pressure chips, and leadless pressure sensors. To realize an extremely sensitive MDPS with broad application potential, including in medical ventilators and fire residual pressure monitors, the “beam-membrane-island” sensor design exhibits the best performance of 66 μV/V/kPa with a natural frequency of 11.3 kHz. In high-accuracy applications, silicon and quartz RPS are analyzed, and both materials show ±0.01%FS accuracy with respect to varying temperature coefficient of frequency (TCF) control methods. To improve MEMS sensor integration, different integrated “pressure + x” sensor designs and fabrication methods are compared. In this realm, the intercoupling effect still requires further investigation. Typical fabrication methods for microsized pressure sensor chips are also reviewed. To date, the chip thickness size can be controlled to be <0.1 mm, which is advantageous for implant sensors. Furthermore, a leadless pressure sensor was analyzed, offering an extremely small package size and harsh environmental compatibility. This review is structured as follows. The background of pressure sensors is first presented. Then, an in-depth introduction to MEMS pressure sensors based on different application scenarios is provided. Additionally, their respective characteristics and significant advancements are analyzed and summarized. Finally, development trends of MEMS pressure sensors in different fields are analyzed.

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MEMS at Bosch — Invented for life

Cited by 4 publications

References 0 publications

Cost-effective microfabrication of sub-micron-depth channels by femto-laser anti-stiction texturing

Cost-effective microfabrication of sub-micron-depth channels by femto-laser anti-stiction texturing

Structural Superlubricity Based on Crystalline Materials

Advances in high-performance MEMS pressure sensors: design, fabrication, and packaging

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