MEMS acoustic emission sensor with mechanical noise rejection

Auerswald, Christian; Sorger, A.; Dienel, Marco; Shaporin, Alexey; Mehner, Jan

doi:10.1109/ssd.2012.6198017

Cited by 8 publications

(11 citation statements)

References 5 publications

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“…the base capacitance C 0 . In contrast, configurations of mechanically un-coupled sensor-arrays that are connected in parallel in the electrical domain (similar to [12]) achieve an increased signal by a higher base capacitance C 0 of the system (see also Supporting Information). This distinction may prove beneficial for certain system aspects, such as read out circuits and energy efficiency.…”

Section: A Performance As Mechanical Filtermentioning

confidence: 99%

“…For more information, see http://creativecommons.org/licenses/by/3.0/ using an array of transducers with different frequencies by Ozevin et al [6]. Alternatively, Sorger et al [11] and Auerswald et al [12] obtained an electro-mechanical bandpass characteristic by exploiting the phase shift between two separate oscillators of different resonance frequency. The disadvantage of relying on resonance for increasing the devices sensitivity are long settling times of the transducer which can lead to undesired downtime in-between the detection of AE/MS events.…”

Section: Introductionmentioning

confidence: 99%

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Off-Resonant Vibration Amplifier With Flattened Band-Pass Characteristic and Improved Axis Selectivity

Maiwald

Müller

Ritz

et al. 2017

J. Microelectromech. Syst.

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We present the design, fabrication, and characterization of an in-plane vibration sensor with frequency selective displacement amplification and differential capacitive read-out. The mechanical structure is based on six resonators with decreasing stiffness coupled in-plane. A differential capacitance attached to the last mass serves as electrical read out. Finite element and lumped element models are both presented. The devices were fabricated in a single mask silicon on insulatorbased process. The mechanical, as well as the capacitive transfer function and the pressure dependence, have been investigated experimentally and compared with simulations. The measured mean (minimum) amplification was 24 dB (16 dB) over a bandwidth of 10 kHz (3-13 kHz). While the mean amplification is pressure dependent, the minimum amplification and bandwidth show a less than 10% decrease over a wide pressure range from 6.3 to 64 mbar. The pressure dependent measurements also show that the minimum amplification is independent of the Q factor of the modes down to values of Q∼10. Both simulation and experiment show that the off-axis modes occur outside the bandwidth of the device. Along with the low cross-sensitivity of the capacitive readout (0.06%), this provides good axis selectivity despite the high number of degrees of freedom. The device can be used for detection of broadband vibration signals, e.g., for structural monitoring of infrastructure such as bridges and pipelines.

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Section: A Performance As Mechanical Filtermentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Off-Resonant Vibration Amplifier With Flattened Band-Pass Characteristic and Improved Axis Selectivity

Maiwald

Müller

Ritz

et al. 2017

J. Microelectromech. Syst.

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“…9 In view of the successful cases of CMUTs in medical applications, many scholars started to seek applications of CMUTs in the field of structural health monitoring (SHM). [10][11][12][13][14][15][16] The acoustic emission (AE) technique, known as the SHM method of capturing and processing the stress-wave signals (usually between 100 kHz and 1 MHz 10 ) rapidly released during the development of structural damages, e.g., cracks, 17 delamination, 18 and fatigue, 19 could diagnose the damage status of structures in service. Transducers are one of the key components of data acquisition in AE systems.…”

Section: Introductionmentioning

confidence: 99%

“…Up to now, many verification studies have been carried out to show the feasibility of applying CMUTs in SHM. [10][11][12][13][14][15][16]24,25 For instance, Ozevin et al 10 demonstrated the possibility of using CMUTs by simulating AE events on a pre-cracked rectangular steel beam specimen. Hossain Saboonchi et al 13 used the MetalMUMPs technique to design and realize CMUTs with high aspect ratio geometry, the sensitivities of which are comparable to the piezoelectric ones.…”

Section: Introductionmentioning

confidence: 99%

FEM-based analysis on sensing out-of-plane displacements of low-order Lamb wave modes by CMUTs

Zhang

Wang

et al. 2022

Journal of Applied Physics

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It is well known that acoustic emission (AE) signals, generated by external impacts or damages such as crack initiation, mainly propagate in the form of Lamb waves in plate-like structures. In this work, MEMS-based resonant capacitive micro-machined ultrasonic transducers (CMUTs), which are designed for sensing out-of-plane displacements, have been verified by finite element method (FEM) modeling and theoretical analysis for their feasibility of detecting low-order Lamb waves (A0 and S0). First, combining the propagation theory of Lamb waves and the “spring-mass-damper” model of CMUTs, the out-of-plane sensing mechanism has been explained, together with the analytical expression of sensitivity. Then, simulations based on FEM have been carried out to show that the designed CMUTs are sensitive to out-of-plane displacements, while extremely insensitive to in-plane displacements. Meanwhile, a transient analysis has found the potential abilities of CMUTs for sensing A0 and S0 lamb waves. Besides, the sensing characteristics of CMUTs have also been investigated, including the influence of squeezed-film damping, the amplitude of the input signal, the cell number, and cell space. Finally, the ball drop impact is simulated to show the potential of identifying the location of the AE source by CMUTs. Our studies reveal the out-of-plane sensing behaviors of CMUTs for Lamb waves and may have the potential in promoting the miniaturization and integration of AE sensors.

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“…Experiments show that the sensitivity of MEMS sensors (8.8×10 7 (V/m)) is about 50 times higher than that of the traditional piezoelectric AE sensor at atmospheric pressure. In 2012, Auerswald et al [5] designed a comb-like driving AE sensor using the principle of capacitance change, but the sensor sensitivity is poor. In the studies on acoustic emission sensors, the resonant capacitance sensors studied by most scholars have low Q and sensitivity (for example, for the traditional perforated plate, Q = 2 when frequency f =182kHz).…”

Section: Introductionmentioning

confidence: 99%

Design and Performance Analysis of 3-D MEMS Acoustic Emission Sensor

Chengyang¹,

Zhang²

2019

Journal of Materials Sciences and Applications

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As a new type of dynamic non-destructive testing, acoustic emission technology can realize the dynamic monitoring of defects caused by materials and the prediction of damage location. MEMS acoustic emission sensors are mainly used to detect the starting position and expansion direction of fatigue cracks. In order to detect the dynamic displacement of material cracks in 3-D, a new 3-D MEMS acoustic emission sensor is proposed, including an in-plane sensing unit and an out-of-plane sensing unit. The structure design and performance analysis of the 3-D MEMS acoustic emission sensor are carried out, and the parameters such as damping and sensitivity of the sensing unit are calculated. The results show that the sensitivity of the sensor is improved, and the calculated sensitivity is 7×1011(V/m); The finite element software ANSYS performs modal harmonic response analysis on the out-of-plane sensing unit and performs modal analysis on the in-plane sensing unit. The obtained results agree well with the theoretical values and meet the engineering design requirements.

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MEMS acoustic emission sensor with mechanical noise rejection

Abstract: The presented paper describes the use of a new approach to develop a high frequency acceleration sensor with good low frequency noise rejection and in contrast to conventional resonant sensors a short settling time, as it is needed for acoustic emission testing.

Cited by 8 publications

References 5 publications

Off-Resonant Vibration Amplifier With Flattened Band-Pass Characteristic and Improved Axis Selectivity

Off-Resonant Vibration Amplifier With Flattened Band-Pass Characteristic and Improved Axis Selectivity

FEM-based analysis on sensing out-of-plane displacements of low-order Lamb wave modes by CMUTs

Design and Performance Analysis of 3-D MEMS Acoustic Emission Sensor

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