MEMS accelerometers on polyimides for failure assessment in aerospace systems

Gonenli, I. E.; Çelik‐Butler, Zeynep; Butler, Donald P.

doi:10.1109/icsens.2010.5690630

2010 IEEE Sensors 2010

DOI: 10.1109/icsens.2010.5690630

|View full text |Cite

MEMS accelerometers on polyimides for failure assessment in aerospace systems

I. E. Gonenli

Zeynep Çelik‐Butler

Donald P. Butler

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...

Citation Types

Supporting

Mentioning

Contrasting

Year Published

2023

Publication Types

Select...

Article1

Relationship

Self Cite0

Independent1

Authors

Journals

Cited by 1 publication

References 25 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

Long-Term Degradation Evaluation of the Mismatch of Sensitive Capacitance in MEMS Accelerometers

Huang

Dong

et al. 2023

Micromachines

View full text Add to dashboard Cite

During long-term use, MEMS accelerometers will experience degradation, such as bias and scale factor changes. Bias of MEMS capacitive accelerometers usually comes from the mismatch of parasitic capacitance and sensitive capacitance. This paper focuses on the mismatch of sensitive capacitance and analyzes the mechanism of long-term degradation of MEMS accelerometers. Firstly, the effect of sensitive capacitance mismatch on the performance of a MEMS accelerometer was investigated. Secondly, a method of measuring the mismatch of sensitive capacitance was proposed, and the validation experiment shows that the accuracy of this measurement can be less than 1.10×10−5 of the sensitive capacitance. For the samples in this experiment, the measurement error of this method can be less than 0.36 fF. Finally, a high-temperature acceleration experiment was performed. The mismatch of the sensitive capacitance during the experiment was monitored based on the proposed method, and the experimental results are analyzed. The experimental result demonstrates that the mismatch of sensitive capacitance varies linearly with time. The change rates of sensitive capacitance mismatch for the two samples are 2.95×10−7 C0/h and 2.66×10−7 C0/h in the high-temperature acceleration experiment at 145 °C, respectively. The change in sensitive capacitance mismatch seems small, but it is not to be ignored during long-term use. The rate of change is similar for the same batch of samples. This could imply that the adverse effects due to the mismatch of sensitive capacitance changes can be reduced by compensating for this variation.

show abstract

Long-Term Degradation Evaluation of the Mismatch of Sensitive Capacitance in MEMS Accelerometers

Huang

Dong

et al. 2023

Micromachines

View full text Add to dashboard Cite

show abstract

scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.

Contact Info

hi@scite.ai

10624 S. Eastern Ave., Ste. A-614

Henderson, NV 89052, USA

Blog Terms and Conditions API Terms Privacy Policy Contact Cookie Preferences Do Not Sell or Share My Personal Information

Made with 💙 for researchers

Part of the Research Solutions Family.

MEMS accelerometers on polyimides for failure assessment in aerospace systems

Cited by 1 publication

References 25 publications

Long-Term Degradation Evaluation of the Mismatch of Sensitive Capacitance in MEMS Accelerometers

Long-Term Degradation Evaluation of the Mismatch of Sensitive Capacitance in MEMS Accelerometers

Contact Info

Product

Resources

About