MEMS-4-MMIC The next step in combined GaAs MEMS-MMIC technology

Baggen, L.; Simon, Winfried; Malmqvist, R.; Vähä-Heikkilä, T.; Maher, Hassan; Seok, Seonho

doi:10.1109/antem.2012.6262342

2012 15 International Symposium on Antenna Technology and Applied Electromagnetics 2012

DOI: 10.1109/antem.2012.6262342

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MEMS-4-MMIC The next step in combined GaAs MEMS-MMIC technology

L. Baggen

Winfried Simon

R. Malmqvist

et al.

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MEMS-4-MMIC The next step in combined GaAs MEMS-MMIC technology

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References 9 publications

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