We studied experimentally the granular structures prepared on the base of ZnO thin films. The influence of acceptor or donor complex, caused by oxygen vacancy and interstitial zinc atom, and impurities (Li or Ga) on the crystallite structure conductivity has been investigated. The effect of granule size and crystallite structure on conductivity and photoconductivity was studied. The new method for determination of electric current dependence on spatial coordinates in thin conducting film was developed, which allowed to diagnose a one-dimensional conductivity in ZnO:Ga films. The experimental results are interpreted on the basis of the scaling hypothesis and the percolation theory.