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2006
DOI: 10.1063/1.2168516
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Membrane folding to achieve three-dimensional nanostructures: Nanopatterned silicon nitride folded with stressed chromium hinges

Abstract: Silicon nitride membranes were nanopatterned and then folded into three-dimensional (3D) configurations. The out-of-plane folding was achieved using stressed metal hinges. The concept of folding nanopatterned membranes into 3D shapes is referred to as nanostructured origami because of the similarity to the Japanese paper-art of origami, in which two-dimensional surfaces are folded into volumetric shapes. The stressed metal hinges were modeled analytically and compared to experiment. Experimental results demons… Show more

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Cited by 94 publications
(95 citation statements)
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“…We fabricated a stressed Cr thin film by thermal evaporation (15)(16)(17)(18) and subsequently evaporated a minimally stressed Cu film to form the bilayer. The flexing of the bimetallic joints (to close the gripper) was driven by the release of residual tensile stress within the Cr thin film, and similar bending behavior of stressed thin films has been previously observed (8,(19)(20)(21)(22)(23)(24). We found both experimentally and theoretically (Fig.…”
supporting
confidence: 65%
“…We fabricated a stressed Cr thin film by thermal evaporation (15)(16)(17)(18) and subsequently evaporated a minimally stressed Cu film to form the bilayer. The flexing of the bimetallic joints (to close the gripper) was driven by the release of residual tensile stress within the Cr thin film, and similar bending behavior of stressed thin films has been previously observed (8,(19)(20)(21)(22)(23)(24). We found both experimentally and theoretically (Fig.…”
supporting
confidence: 65%
“…Recent technological developments, such as nanostructured origami [1] and strain engineering of nanomembranes [30], have demonstrated the possibility of producing extremely thin membrane structures that can be folded in a controlled fashion. These structures have great potential as components of electromechanical devices such as force probes, capacitors, resonators, etc.…”
Section: Discussionmentioning
confidence: 99%
“…24, for (m, n) = (2, 5) and (3, 5), complement the set of D 5 -symmetric solutions made of 10 pieces (the (m, n) = (4, 5) and (1,5) solutions are shown in Figs. 22 and 23, respectively).…”
Section: Higher-order One-and Two-sided Developable Stripsmentioning
confidence: 99%
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