Bifunctional derivatives (XMe 2 Si) 2 Si(SiMe 3 ) 2 (X = H, Cl, or OH) were synthesized for the first time by the reaction of tetrakis(trimethylsilyl)silane with SbCl 5 . The molecular and crystal structure of bis(hydroxydimethylsilyl)bis(trimethylsilyl)silane was established by X ray diffrac tion. The fragmentation of the resulting compounds under electron impact was studied by mass spectrometry.Key words: tetrakis(trimethylsilyl)silane, antimony pentachloride, bifunctional tetra kis(trimethylsilyl)silane derivatives, X ray diffraction study, mass spectrometry.* The reaction products were identified based on empirical mass spectrum-structure relationships.