2009
DOI: 10.1063/1.3095687
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Mechanisms of the laser plume expansion during the ablation of LiMn2O4

Abstract: Films of LiMn 2 O 4 prepared by pulsed laser ablation deposition are typically lithium deficient when grown at background pressures ranging between 10 −4 and 20 Pa. The deficiency of light atomic species such as lithium in LiMn 2 O 4 thin films occurs as a result of the different behavior of the species during plume expansion and the deposition of the film at elevated deposition temperatures. The plasma plume evolution in vacuum and 20 Pa oxygen pressure are studied using two spectroscopic techniques: emission… Show more

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Cited by 80 publications
(78 citation statements)
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References 42 publications
(52 reference statements)
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“…During expansion in a background gas, the plume undergoes multiple scattering with the oxygen molecules, resulting in a spatial splitting into species which travel without collisions (fast) and species undergoing collisions (slow). This effect has been reported in the literature [21], and is observed for Table 4. In ns ablation the plume front position follows a τ 2/5 time dependence, in agreement with the shock wave (SKW) propagation model in gases [25].…”
Section: Plume Expansion In An Oxygen Background Pressure Of 60 Pasupporting
confidence: 67%
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“…During expansion in a background gas, the plume undergoes multiple scattering with the oxygen molecules, resulting in a spatial splitting into species which travel without collisions (fast) and species undergoing collisions (slow). This effect has been reported in the literature [21], and is observed for Table 4. In ns ablation the plume front position follows a τ 2/5 time dependence, in agreement with the shock wave (SKW) propagation model in gases [25].…”
Section: Plume Expansion In An Oxygen Background Pressure Of 60 Pasupporting
confidence: 67%
“…7c, d). A non-uniform distribution of elements in the plasma, as reported for Ba in BaTiO 3 [33] and Li in LiMn 2 O 4 [21] is also not likely because no pronounced differences in the distribution of the elements is detected. The small differences in the kinetic energies of the ablated species are probably not being enough to explain the non stoichiometric transfer in fs ablation.…”
Section: Discussionmentioning
confidence: 86%
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“…It has been generally recognized that during the PLD growth of multicomponent oxide thin films, the background gas pressure can induce significant variations of the angular distribution of different species in the plume, which in turn results in off-stoichiometry of films with respect to the chemical composition of a target. [51][52][53][54][55] More specifically, in nearly vacuum, the plume is primarily composed of elemental atomic/ionic species. Compared to heavier ions, lighter species tend to propagate with higher velocity and hence a narrower angular distribution towards the substrate normal.…”
Section: A Synthesismentioning
confidence: 99%
“…A similar effect has been observed in ns laser ablation of LiNbO 3 where the Li had a wider distribution than Nb. 32 Fitting the angular distributions to Eq. ͑6͒, values of k zy Ϸ 4.4 for the aspect ratio of the main Ni ion feature and k zy Ϸ 2.3 for the contamination component were found.…”
Section: A Ion Plasma Plumementioning
confidence: 99%