2006
DOI: 10.1088/0957-4484/17/17/028
|View full text |Cite
|
Sign up to set email alerts
|

Mechanism of the nanoscale localization of Ge quantum dot nucleation on focused ion beam templated Si(001) surfaces

Abstract: We investigate the fundamental mechanism by which self-assembled Ge islands can be nucleated at specific sites on Si(001) using ultra-low-dose focused ion beam (FIB) pre-patterning. Island nucleation is controlled by a nanotopography that forms after the implantation of Ga ions during subsequent thermal annealing of the substrate. This nanotopography evolves during the annealing stage, changing from a nanoscale annular depression associated with each focused ion beam spot to a nanoscale pit, and eventually dis… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1
1
1
1

Citation Types

3
46
0

Year Published

2007
2007
2016
2016

Publication Types

Select...
5
3

Relationship

0
8

Authors

Journals

citations
Cited by 53 publications
(51 citation statements)
references
References 25 publications
(56 reference statements)
3
46
0
Order By: Relevance
“…Topography is known to promote crystallization directly from a vapor (2)(3)(4)(5), because these systems typically exhibit low contact angles. Crystallization from the melt, in contrast, is associated with very high contact angles such that topography is usually ineffective (6).…”
mentioning
confidence: 99%
“…Topography is known to promote crystallization directly from a vapor (2)(3)(4)(5), because these systems typically exhibit low contact angles. Crystallization from the melt, in contrast, is associated with very high contact angles such that topography is usually ineffective (6).…”
mentioning
confidence: 99%
“…This is in strong contrast to the previous reports on directed self-assembly of Ge using pit patterns where the formation occurs preferentially within the pits. 23,[27][28][29][30] Furthermore, we find that the patterns where optimal QD formation occurs are not in fact composed of isolated pits in the flat (001) terrace; rather, the surface appears to be continuously height modulated with no flat terrace regions between the pits. The striking resemblance between the before/after micrographs raises the question of whether Ge QDs are self-assembling, or instead, Ge just conformally coats the patterned Si surface.…”
Section: Resultsmentioning
confidence: 74%
“…27 The growth of Ge QDs in the TEM was accomplished using chemical vapor deposition at 550°C. For optimal patterning dose and postannealing conditions, small Ge QDs % 20 nm in diameter are obtained, on ultrasmall pits found (by ex situ AFM) to be only 10 nm in diameter, 1 nm deep, and 200 nm apart.…”
Section: Discussionmentioning
confidence: 99%
“…QDMCs of this description have been fabricated using EUV lithography. [7,19,74] Our first step was to develop a process using focused ion beam patterning to control the initial QD layer, [22,24,25,80,83] and then develop the necessary growth protocols to extend the QDMC in the third dimension. Specific challenges include: directing nucleation at reduced length scales, i.e.…”
Section: Scanning Electron Microscopy (Sem)mentioning
confidence: 99%
“…Modification of the surface has been achieved by means of lithography, [18][19][20] nano-indentation [21] and ion-beam processing. [22][23][24][25] The various techniques and experiments cover a large range of surface features to direct the growth including pits, [18,19,22] stripes, [26][27][28] mesas, [29,30] and oxide windows, [31] as well as a wide range of QD areal density, growth temperatures, composition and deposition thickness. We have investigated the use of a Ga+ focused ion beam (FIB) to direct write patterns on Si (001) surfaces to direct precise positioning of Ge QDs at sub-100 nm lengthscales.…”
Section: Introductionmentioning
confidence: 99%