Mechanism of Resist Pattern Collapse during Development Process

Tanaka, Toshihiko; Morigami, Mitsuaki; Atoda, Nobufumi

doi:10.1143/jjap.32.6059

Cited by 362 publications

(302 citation statements)

References 3 publications

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“…Each plate is assumed to be free at one end and anchored at the other end to a substrate [10]. Between neighbouring plates, defining a cell, we assume that there is a liquid reservoir.…”

Section: Collective Dynamics Of Elastic Plates (A) Experimental Obsermentioning

confidence: 99%

Elastocapillary coalescence of plates and pillars

et al. 2015

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When a fluid-immersed array of lamellae or filaments that is attached to a substrate is dried, evaporation leads to the formation of menisci on the tips of the plates or pillars that bring them together. Similarly, when hair dries it clumps together due to capillary forces induced by the liquid menisci between the flexible hairs. Building on prior experimental observations, we use a combination of theory and computation to understand the nature of this instability and its evolution in both the two-dimensional and three-dimensional setting of the problem. For the case of lamellae, we explicitly derive the interaction torques based on the relevant physical parameters. A Bloch-wave analysis for our periodic mechanical system captures the critical volume of the liquid and the 2-plate-collapse eigenmode at the onset of instability. We study the evolution of clusters and their arrest using numerical simulations to explain the hierarchical cluster formation and characterize the sensitive dependence of the final structures on the initial perturbations. We then generalize our analysis to treat the problem of pillar collapse in 3D, where the fluid domain is completely connected and the interface is a surface with the uniform mean curvature. Our theory and simulations capture the salient features of both previous experimental observations and our own in terms of the key parameters that can be used to control the kinetics of the process

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“…Each plate is assumed to be free at one end and anchored at the other end to a substrate [10]. Between neighbouring plates, defining a cell, we assume that there is a liquid reservoir.…”

Section: Collective Dynamics Of Elastic Plates (A) Experimental Obsermentioning

confidence: 99%

Elastocapillary coalescence of plates and pillars

et al. 2015

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“…3 This model neglects the effects of lateral contraction due to a nonzero Poisson's ratio. As the systems considered here are plates, rather than beams, a bending plate theory is more appropriate.…”

Section: B Bending Simulationsmentioning

confidence: 99%

“…2 This collapse has been attributed to capillary forces caused by the surface tension of the rinse liquid. 2,3 Simple continuum-mechanics models of cantilever beams have been used to describe the collapse of polymer structures such as ''walls'' or ''plates.'' 2,3 These models ͑and many other aspects of lithography and nanofabrication͒ implicitly assume the validity of continuum mechanics, even for structure sizes well below 100 nm.…”

Section: Introductionmentioning

confidence: 99%

Evidence for size-dependent mechanical properties from simulations of nanoscopic polymeric structures

Böhme

Pablo

2002

The Journal of Chemical Physics

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Discontinuous molecular dynamics simulations of a model polymer have been conducted to investigate the glass transition of ultrathin films and the mechanical properties of nanoscopic structures. Continuum mechanics models have been applied to interpret simulation data and extract apparent Young's Moduli. Consistent with experiments, the results of simulations indicate that the glass transition temperature of thin films can be higher or lower than that of the bulk, depending on the nature of polymer-substrate interactions. Simulations also indicate that the mechanical properties of nanoscopic structures can be considerably different from those of the bulk. An analysis of molecular strain distributions in nanostructures undergoing a deformation indicate that significant stress relaxation occurs at air-polymer interfaces. A comparison of these distributions to the results of continuum, finite-element calculations reveal pronounced differences between the continuum and molecular approaches.

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“…Various surface interactions can be generated by freeing the surface energy through this treatment ( The PDMS has most serious technical problems that must be solved before soft lithography can be used in forming complex patterned structures ( Figure 6). First, gravity, adhesion and capillary forces (T. Tanaka et al, 1993) exert stress on the elastomeric features and cause them to collapse and generate defects in the pattern that is formed (E. Delamarche et al, 1977). If the aspect ratio of the relief features is too large, the PDMS microstructures fall under their own weight or collapse owing to the forces typical of inking or printing of the stamp.…”

Section: Wwwintechopencommentioning

confidence: 99%

Application of Soft Lithography for Nano Functional Devices

Kang¹

2010

Lithography

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Mechanism of Resist Pattern Collapse during Development Process

Cited by 362 publications

References 3 publications

Elastocapillary coalescence of plates and pillars

Elastocapillary coalescence of plates and pillars

Evidence for size-dependent mechanical properties from simulations of nanoscopic polymeric structures

Application of Soft Lithography for Nano Functional Devices

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