1998
DOI: 10.1063/1.367106
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Mechanism of incongruent ablation of SrTiO3

Abstract: At low fluences, the [Sr]/[Ti] ratio of laser deposited SrTiO3 films appears to be a function of the laser fluence. The deviation from stoichiometry is remarkably constant in time. From an analysis of both the composition of the film and the irradiated target, we deduce a volume-diffusion-assisted preferential ablation process. At high fluences (above 1.3 J/cm2), stoichiometric SrTiO3 films are obtained. This is not due to a change in ablation mechanism, but follows from the fact that at 1.3 J/cm2 the calculat… Show more

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Cited by 44 publications
(48 citation statements)
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“…34 Similar investigations on STO thin films have also been made by Dam et al and reports that the nonstoichiometric ablation occurs from a SrTiO 3 target when fluence is below 1.3 J/cm 2 . 35 Recently Packwood et al prepared lithium maganite thin films by PLD. 36 The films are found to be non-stoichiometric and are attributed to dependence of ablation probability of a particular species upon laser fluence.…”
Section: Resultsmentioning
confidence: 99%
“…34 Similar investigations on STO thin films have also been made by Dam et al and reports that the nonstoichiometric ablation occurs from a SrTiO 3 target when fluence is below 1.3 J/cm 2 . 35 Recently Packwood et al prepared lithium maganite thin films by PLD. 36 The films are found to be non-stoichiometric and are attributed to dependence of ablation probability of a particular species upon laser fluence.…”
Section: Resultsmentioning
confidence: 99%
“…A valuable premise to reduce possible sources of off-stoichiometry 19 and, eventually, impose a good level of reproducibility of the oxide thin films, is the understanding of the influence of the ablation process on the chemistry of the target surface. Indeed, depending upon the element-specific ablation thresholds and the density of the ceramic target itself, differential ablation processes can give rise to unexpected segregation onto the target surface.…”
Section: Growth From a Mixed-phases Targetmentioning
confidence: 99%
“…4,[8][9][10][11] Nonetheless, the physical mechanisms underlying this phenomenon has not yet been clarified up to now. In an early work, 12 the Ti deficiency of STO thin films grown at low laser fluences was attributed to a volume-diffusion-assisted preferential ablation process. However, the deviations from the target stoichiometry at higher laser fluence could not be explained within this model.…”
mentioning
confidence: 99%