50+ Years of AIMETA 2022
DOI: 10.1007/978-3-030-94195-6_26
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Mechanics of Microsystems: A Recent Journey in a Fascinating Branch of Mechanics

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Cited by 3 publications
(3 citation statements)
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“…In principle, a discrete action space could have been set by modifying the length of each resonator according to the tolerances of the manufacturing process. However, considering 30 resonators and a fabrication process tolerance of 0.15 m (consistent with the STMicroelectronics ThELMA®technology 42 ) leads to an exploding number of possible designs. Consequently, a continuous action space and a continuous system state have been preferred, and the use of function approximators, namely NNs, is required instead of tabular approaches.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…In principle, a discrete action space could have been set by modifying the length of each resonator according to the tolerances of the manufacturing process. However, considering 30 resonators and a fabrication process tolerance of 0.15 m (consistent with the STMicroelectronics ThELMA®technology 42 ) leads to an exploding number of possible designs. Consequently, a continuous action space and a continuous system state have been preferred, and the use of function approximators, namely NNs, is required instead of tabular approaches.…”
Section: Methodsmentioning
confidence: 99%
“…On the application side, the optimisation of graded metamaterials for energy harvesting under a realistic input has been considered for the first time. The design we propose is fully compatible with micro fabrication paving a path towards the development of ultra-wide band (UWB) micro-electro-mechanical systems (MEMS) 42 for energy harvesting using metamaterials.
Figure 1 Schematic of the device used for energy harvesting and the optimisation procedure.
…”
Section: Introductionmentioning
confidence: 99%
“…MEMSs are often constituted by standard structural elements such as (micro)beams, (micro)plates and micro(arches) suspended over a parallel ground plate, and under direct current (DC) voltage, alternating current (AC) voltage, or both, and classical theories usually apply [6]. Recent review papers present the current stage of research on electrically actuated MEMS, analyzing their theoretical developments and mathematical modeling, nonlinear static and dynamic behaviors, advances in fabrication technologies, development of highperformance nano and microscale systems, and other recent advances in the field [7][8][9][10][11][12].…”
Section: Introductionmentioning
confidence: 99%