Mechanical testing of micro samples produced by a novel LIGA related process chain

Abstract

In this paper, a new LIGA related process chain, named MSG process [German acronym for multicomponent injection molding (MS) and electroplating (G)] is presented as a promising production cycle for the replication of micro-testing samples. Structures manufactured by the LIGA process but also e.g. micro-milled structures can be reproduced. The focus of this work was two fold: First, the accuracy of different replicated structures was investigated, and second, the influence of the surface quality on mechanical performance of electrodeposited nanocrystalline materials was tested. Therefore, micro samples were manufactured by the use of different methods resulting in a variation of the measured surface quality. The surface of LIGA and micro-milled samples can be accurately replicated using this process. Furthermore, it can be shown which dimensional variations within the process occur and how this is influenced by the surface of the original structure. Finally, preliminary mechanical tests are presented which show the successful application of the MSG process.

Technology maturity assessment of micro and nano manufacturing processes and process chains

“…Thus, it is not surprising that the design and validation of such process chains have attracted the attention of researchers, and some successful implementations have been reported to address specific functional and technical requirements of emerging multi-material products. [11][12][13][14][15][16] However, the manufacture of micro-products using such process chains is still in its infancy, and thus, further research is required to characterize existing process chains and also to develop new ones for the fabrication of miniaturized multi-material products. This prompts the research community to look for systematic approaches to assess such process chains at the technology and platform levels.…”

“…Thus, it is not surprising that the design and validation of such process chains have attracted the attention of researchers, and some successful implementations have been reported to address specific functional and technical requirements of emerging multi-material products. 11–16…”