Mechanical Property Evaluation of Electrodeposited Nanocrystalline Metals by Micro-testing

Abstract

Electrodeposition is a very important technology in the fabrication of micro-components for micro-electro-mechanical systems MEMS or integrated circuits. Evaluations of the materials used in these devices as D components should be conducted using micro-sized specimens due to the sample size effect on the practical use of the components. Nanocrystalline metals could be deposited using an electrodeposition method with supercritical CO emulsion. Our experiment on the micro-specimens provides information on micro-mechanical testing of electrodeposited metals including the effect of sample size, grain size, and anisotropic structures on mechanical properties. In this chapter, recent studies on crystal growth in electrodeposition of metals and its evaluation using micron-sized testing will be presented.

Evaluation of the Shape Memory Effect by Micro-Compression Testing of Single Crystalline Ti-27Nb Ni-Free Alloy

“…Non-tapered pillars were formed by ion irradiation vertical to the pillar axis using a FB2001 FIB (Hitachi, Tokyo, Japan). Details of the fabrication method can be found elsewhere [19,20]. Two square sections were milled from each pillar by ion irradiation normal to the plate, leaving a rectangle pillar on the plate edge.…”

“…Micro-compression tests were conducted with a test machine developed by our group [19,20]. A schematic diagram of the machine is shown in Figure 1a.…”