2001
DOI: 10.1016/s0040-6090(01)01344-x
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Mechanical properties of Ti–B–C–N coatings deposited by magnetron sputtering

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Cited by 56 publications
(28 citation statements)
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“…Because oxidation of materials is usually controlled by diffusion, 6–9 the relation of the reacted fraction ξ with temperature T and the heating rate η has been deduced in our recent work based on the Fick diffusion law 13 . The equation is as following: …”
Section: Resultsmentioning
confidence: 99%
“…Because oxidation of materials is usually controlled by diffusion, 6–9 the relation of the reacted fraction ξ with temperature T and the heating rate η has been deduced in our recent work based on the Fick diffusion law 13 . The equation is as following: …”
Section: Resultsmentioning
confidence: 99%
“…The other kind of nanocomposites consists of those formed by crystals of a hard phase embedded in a soft phase. These soft phases usually have selflubricant properties and some examples from the literature are ZrN/Cu [11,12], TiN/CN x [13], WC/DLC/WS 2 [14] and many other transition-metal carbides dispersed in amorphous carbon (a-C) matrix namely as MeC/a-C (TiC/a-C [15][16][17][18][19], WC/a-C [20,21], TiBC/a-C [22,23]). …”
Section: Introductionmentioning
confidence: 99%
“…The phase was identified as TiN. On the other hand, the Ti-B-C-N films deposited by Zhong et al [9,10] consisted of TiB 2 , TiC and TiN nano-crystallites, with particle sizes on the order of 2.5 nm embedded in a quasiamorphous matrix. This difference in the existing phases in the Ti-B-C-N film seemed to be due to the different deposition parameters and the different film compositions.…”
Section: Resultsmentioning
confidence: 98%
“…This difference in the existing phases in the Ti-B-C-N film seemed to be due to the different deposition parameters and the different film compositions. It is noted that Zhong et al [9,10] deposited the Ti-B-C-N film using RF magnetron sputtering under the condition of an RF power density of 11.2 W/cm 2 and a substrate bias of -50 V, while we deposited the Ti-B-C-N film using DC magnetron sputtering. The XPS spectra shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
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