2009
DOI: 10.1007/s11671-009-9467-7
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Mechanical Properties of Silicon Nanowires

Abstract: Nanowires have been taken much attention as a nanoscale building block, which can perform the excellent mechanical function as an electromechanical device. Here, we have performed atomic force microscope (AFM)-based nanoindentation experiments of silicon nanowires in order to investigate the mechanical properties of silicon nanowires. It is shown that stiffness of nanowires is well described by Hertz theory and that elastic modulus of silicon nanowires with various diameters from ~100 to ~600 nm is close to th… Show more

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Cited by 105 publications
(64 citation statements)
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“…This means that at the micrometer scale the mechanical strength of the best silicon materials is comparable with the strength of wafers at the millimeter scale. This is consistent with the observation that size effects do not play a role on the elastic behaviour of silicon nanowires with a diameter >100 nm (Sohn et al, 2010). In recent years, several techniques such as the chemical vapor deposition (CVD) vapor liquid solid (VLS) or CVD-VLS method have been developed to grow nanowires with diameters down to the few nanometer range.…”
Section: Fracture Behaviour Of Silicon In Mesoscopic and Nanoscopic Ssupporting
confidence: 86%
“…This means that at the micrometer scale the mechanical strength of the best silicon materials is comparable with the strength of wafers at the millimeter scale. This is consistent with the observation that size effects do not play a role on the elastic behaviour of silicon nanowires with a diameter >100 nm (Sohn et al, 2010). In recent years, several techniques such as the chemical vapor deposition (CVD) vapor liquid solid (VLS) or CVD-VLS method have been developed to grow nanowires with diameters down to the few nanometer range.…”
Section: Fracture Behaviour Of Silicon In Mesoscopic and Nanoscopic Ssupporting
confidence: 86%
“…Furthermore, due to the multiscale, FEM-based nature of the SCB model, stiffening and softening at size scales (greater than 30 nm) that are much larger than what is tractable using full-scale atomistic simulations and comparable to what has been studied experimentally have been predicted using the SCB model. It is worth noting that all of while these trends have been observed experimentally [67,224,225,228,229], other experiments have not observed the same sizedependence in elastic properties [226,227,299].…”
Section: Surface Cauchy-born Model: Nanowire Resonatormentioning
confidence: 63%
“…The existence of scale-dependent behavior has been confirmed by experimental measurements, including resonance frequency tests [6], tensile testing in scanning electron microscope (SEM) [7], transmission electron microscope (TEM) [8,9], atomic force microscope (AFM) [10,11] and nanoindenter [12] and also theoretical investigations, including ab initio and density functional theory (DFT) [13,14,15], molecular dynamics (MD) [16,17,18,19] and modifications to continuum theory [20,21,22,23]. Although scale-dependence has been observed by both theory and experiment, a considerable discrepancy still remains between the experiments and models.…”
Section: Scale-dependencementioning
confidence: 86%