Mechanical properties of DLC films prepared inside of micro-holes by pulse plasma CVD

Yang, Xudong; Saito, Takao; Nakamura, Yukinori; Kondo, Yasuhisa; Ohtake, Naoto

doi:10.1016/j.diamond.2004.06.036

Cited by 42 publications

(22 citation statements)

References 5 publications

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“…Of all the surface treatment materials, DLC film has received the most attention because of its superior tribological characteristics correlated to the fraction of sp 3 bonds in the films, such as its low friction coefficient and high wear resistance. 6) Generally, the volume loss of the wear tests allows the wear rate of the material to be calculated. Figure 5 reveals the wear volume of the different duty cycles of the bipolar-pulsed PECVD.…”

Section: −mentioning

confidence: 99%

“…4,5) Diamond-like carbon (DLC) films are metastable amorphous carbon (sp 3 and sp 2 bonds) materials with superior tribological characteristics. 6) The high hardness, low friction coefficient and chemical resistance of the DLC films make them good candidates as protective coatings for metal, steels and optical or electronic components. 7) Recently, direct cur-…”

Section: Introductionmentioning

confidence: 99%

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Deposition of DLC/oxynitriding Films onto JIS SKD11 Steel by Bipolar-pulsed PECVD

Chang

Huang³

et al. 2015

ISIJ Int.

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Section: −mentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Deposition of DLC/oxynitriding Films onto JIS SKD11 Steel by Bipolar-pulsed PECVD

Chang

Huang³

et al. 2015

ISIJ Int.

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“…It is difficult to obtain the actual hardnesses of the soft a-C:H film, and a-C:Si:H film obtained with a load lower than 50 µN in indentation tests. The results of our studies indicate that a high-resolution indentation test achieves a nanometer-thick film with a certain degree of hardness, estimated at 3600 N/mm 2 . To obtain film hardness, in indentation tests for nanometer-thick films, it is important to consider the optimization of load relative to depth.…”

Section: Resultsmentioning

confidence: 88%

Effect of Substrates on Film Hardness Measurements of Nanometer Thick Amorphous Carbon Films

Akasaka

Ito

Nakano³

et al. 2009

JMMP

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Amorphous carbon film (a-C:H) applications, such as hard disks, require films with nanometer thicknesses. In an indentation test, the obtained hardness values of these films are affected by substrates. On the indentation tests, we studied the effect of substrate hardness on films less than 200 nm in thickness. a-C:H and Si doped a-C:H (a-C:Si:H) films were deposited by electron cyclotron resonance plasma chemical vapor deposition onto aluminum (Al) and silicon (Si) substrates. The film thicknesses were approximately 140 nm. The hardnesses of the a-C:H film and substrates were obtained using a high-resolution indentation tester (pico-dentor) with a Vickers tip whose depth resolution was 0.04 nm. Maximum indentation loads were varied from 0.01 to 0.5 mN. The Martens hardnesses of films on the Al and Si substrates were 600 and 7000 N/mm 2 , respectively. On the a-C:Si:H film deposited on the Al substrate, the hardnesses increased from 1600 to 3900 N/mm 2 with decreasing indentation load. The hardnesses of the films deposited on the Si substrate decreased from 5300 to 3500 N/mm 2 when the maximum indentation loads were reduced. The effect of the substrates increased with the maximum load increasing. From these findings, the actual hardness value was determined to be 3600 N/mm 2 . These results indicate that the high-resolution indentation test achieved hardness estimations for nanometer-thick films with certain hardnesses.

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“…[3]. First application was reported by Yang et al, who applied to the micro-extrusion die using pulse plasma chemical vapor deposition (CVD) method [4]. Similarly, the friction properties of DLC coated microdies were followed by Krishnan et al, for micro-extrusion process [5] and by Fujimoto et al for microbending process [6], Aizawa et al for micro-bending with ironing [7], and Hu et al [8] and by Wang et al [9] for micro-deep drawing process.…”

Section: Introductionmentioning

confidence: 99%

Development of in-situ observation system of dynamic contact interface between dies and materials during microforming operation

Shimizu

Kakegawa

Yang

2015

MATEC Web of Conferences

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Abstract. Application of diamond like carbon (DLC) films are reported in several microforming processes, in view of its great tribological performance owe to the low friction and the high chemical stability. However, due to its high internal residual stress, the film properties with the low adhesion strength and the high wear rate under severe tribological conditions are still remain as technical issues. However, since the dynamic variation of the contact state cannot be observed during the forming operation, it is difficult to recognize the origin and the influential tribological factors of tool life for DLC coated microforming die. Therefore, the appropriate DLC film properties for the contact state in microforming operation have not been clarified. To observe the dynamic variation of the contact state during the microforming operation, present study developed a novel microforming die assembly installed the in-situ observation system with silica glass die and high speed recording camera. By using this system, the dynamic delamination behaviour of DLC films during the progressive micro-bending process was successfully demonstrated. The influential factors for the durability of DLC coated microdies were discussed.

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Mechanical properties of DLC films prepared inside of micro-holes by pulse plasma CVD

Cited by 42 publications

References 5 publications

Deposition of DLC/oxynitriding Films onto JIS SKD11 Steel by Bipolar-pulsed PECVD

Deposition of DLC/oxynitriding Films onto JIS SKD11 Steel by Bipolar-pulsed PECVD

Effect of Substrates on Film Hardness Measurements of Nanometer Thick Amorphous Carbon Films

Development of in-situ observation system of dynamic contact interface between dies and materials during microforming operation

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