2019
DOI: 10.1016/j.surfcoat.2019.07.003
|View full text |Cite
|
Sign up to set email alerts
|

Mechanical properties and epitaxial growth of TiN/AlN superlattices

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
5

Citation Types

0
11
0

Year Published

2020
2020
2021
2021

Publication Types

Select...
7

Relationship

0
7

Authors

Journals

citations
Cited by 33 publications
(11 citation statements)
references
References 47 publications
0
11
0
Order By: Relevance
“…AlCrON) and the formation of nitride coatings based on high-entropy alloys (HEA). Nanostructured multilayer coatings, especially superlattice coatings, show particularly advantageous properties (Angelov et al 2018), (Hovsepian et al 2005;Hovsepian et al 2016), (Lin et al 2019), (Fallmann et al 2019), and (Czechowski et al 2019).…”
Section: Introductionmentioning
confidence: 99%
“…AlCrON) and the formation of nitride coatings based on high-entropy alloys (HEA). Nanostructured multilayer coatings, especially superlattice coatings, show particularly advantageous properties (Angelov et al 2018), (Hovsepian et al 2005;Hovsepian et al 2016), (Lin et al 2019), (Fallmann et al 2019), and (Czechowski et al 2019).…”
Section: Introductionmentioning
confidence: 99%
“…According to Fallmann et al . [14] , the hardness peak ( H ≈ 37 GPa) overlaps with the indentation modulus minimum ( E ≈ 400 GPa) measured for films with the lowest bilayer period ( ≈ 2 . 5 nm).…”
Section: Introductionmentioning
confidence: 56%
“…8 % [25] ) provides coherency stresses, which inhibit dislocation motion, and thus contribute to hardness enhancement. Specifically, hardness values reported for B1 AlN/TiN SLs reach up to 38 GPa [1,14] and strongly depend on . According to Fallmann et al .…”
Section: Introductionmentioning
confidence: 97%
See 2 more Smart Citations