Mechanical domain coupled mode parametric resonance and amplification in a torsional mode micro electro mechanical oscillator

Abstract

In this paper, we experimentally demonstrate non-degenerate parametric resonance in a torsional micro electro mechanical (MEM) oscillator with two interacting mechanical modes of oscillation. The parametric oscillation results from a displacement-dependent electrostatic force generated in both the modes of oscillation. There is a decoupling of the input and the output frequencies in this mode of operation where the system responds at the primary natural frequency when driven at the sum of the first two mechanical modes. This can be implemented in many commonly used MEM oscillator configurations including the cantilever beam geometry. In this mode of operation, single oscillator non-degenerate parametric amplifiers as well as resonant mode sensors based on the frequency selectivity of parametric resonance can be implemented.

Nonlinear Dynamics of Nanomechanical and Micromechanical Resonators

“…Above this threshold, the amplitude of the motion grows until it is saturated by nonlinear effects. We shall describe the nature of these oscillations for driving above threshold later on, both for the first (n = 1) and the second (n = 2) instability tongues, but first we shall consider the dynamics when the driving amplitude is just below threshold, as it also offers interesting behavior, and a possibility for novel applications such as parametric amplification [23,24,54] and noise squeezing [23].…”

Nonlinear Dynamics of Nanomechanical Resonators

“…Above this threshold, the amplitude of the motion grows until it is saturated by nonlinear effects. We shall describe the nature of these oscillations for driving above threshold later, both for the first (n D 1) and the second (n D 2) instability tongues, but first we shall consider the dynamics when the driving amplitude is just below threshold, as it also offers interesting behavior and a possibility for novel applications such as parametric amplification [4,12,57] and noise squeezing [57].…”

A Coupled Resonator for Highly Tunable and Amplified Mixer/Filter

“…Significant efforts have been dedicated to improve the signal-to-noise ratio by mechanical amplification of the signal prior to the electronic amplification. Most of the explored methods in mechanically coupled resonators have relied mainly on parametric amplification, in which the mechanical amplification is achieved by exciting the pump beams at twice the resonance frequency (pump frequency) [1][2][3][4][5][6][7]. As a result, the small signal generated by one beam is amplified at the other beam through a weak coupler [1][2][3]6].…”