Abstract:The reference cantilever method is shown to act as a direct and simple method for determination of torsional spring constant. It has been applied to the characterization of micropaddle structures similar to those proposed for resonant functionalized chemical sensors and resonant thermal detectors. It is shown that this method can be used as an effective procedure to characterize a key parameter of these devices and would be applicable to characterization of other similar MEMS/NEMS devices such as micromirrors.… Show more
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