Mechanical characterization of post-buckled micro-bridge beams by micro-tensile testing

Zhang, Duanqin; Chu, Jinkui

doi:10.1007/s00542-009-0934-y

Cited by 6 publications

(4 citation statements)

References 25 publications

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“…In order to obtain robust and reliable devices, the mechanical properties of structural metal beam should be improved by controlling the residual stress and etch release effects during the fabrication process. Although there has been plenty of research on analysing or controlling the residual stress in various types of materials [10,[12][13][14][15][16][17][18][19][20][21][22][23][24], the behaviour of compressive or tensile-stressed films under different etch release conditions have not yet been addressed in the literature. Moreover, the deflection behaviour of structural metal materials such as tantalum has not been studied satisfactorily as much as the semiconductor processing materials such as Si, SiO 2 and Poly-Si.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and characterisation of suspended microstructures of tantalum

Al-mashaal

Mastropaolo

Bunting

et al. 2016

J. Micromech. Microeng.

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An investigation of the influence of deposition and post-fabrication processes on the final mechanical structure of tantalum beams is reported in the present study. The final deflection profiles of doubly supported beams made from compressive and tensile-stressed films have been studied experimentally. An optimum finite element model has been developed to predict the buckling behaviour of the doubly supported beams by considering the boundary conditions in the form of a compressive stress and an applied load. No matter which etch release method has been used, the initial stress state of the as-deposited films has been found to have a significant impact on the final deflection profile of the fabricated device. The compressive-stressed films have presented larger deflection in the final released beams than the tensile-stressed films. Taking into account the type of etch release methods, the beams that have been released in the dry etch release processes have been found to deform more vertically than those released in the wet-etch release method. Moreover, it has been found that the amplitude of vertical deflection increases with the increase of the beam length and thickness. The results indicate that optimum profiles of tantalum suspended structures can be obtained from the tensile-stressed films that have been released by the wet etching method with an aspect ratio of 1:48.

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Section: Introductionmentioning

confidence: 99%

Fabrication and characterisation of suspended microstructures of tantalum

Al-mashaal

Mastropaolo

Bunting

et al. 2016

J. Micromech. Microeng.

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“…The present work has built upon the significant previous work developed at COMTES FHT Inc. regarding the use of miniature M-TT samples to explore the location-and orientation-dependence of properties in a variety of AM-processed as well as conventionallyprocessed materials [5,[7][8][9][10][11] to complement related work ongoing at a number of locations [2,[13][14][15][16][17][18][19][20][21][22][23]. In the present work on both as-deposited and post-treated IN 718, the M-TT tests conducted successfully illustrated the mechanical property variations at different locations and orientations in the as-deposited materials, Figures 11 and 12 and these appear to be consistent with the microstructural changes present in those regions, captured in Figure 15.…”

Section: Discussionmentioning

confidence: 99%

“…The M-TT approach has been verified for multiple materials while the currently used test procedure was developed in previous works [7][8][9][10][11] and is being discussed by the standards community [12]. Ongoing issues related to testing of small-sized specimens, such as specimen size effect, are discussed in the literature [13][14][15][16][17][18][19], while the important effects of grain size in relation to sample size for such sub-sized specimens has also been addressed [20,21].…”

Section: Introductionmentioning

confidence: 99%

The Use of Miniature Specimens to Determine Local Properties and Fracture Behavior of LPBF-Processed Inconel 718 in as-Deposited and Post-Treated States

et al. 2022

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This paper summarizes the assessment of directional anisotropy in local mechanical properties for Laser Powder Bed Fusion (LPBF) IN-718 bulk samples via the use of miniature samples excised from the bulk for both as-deposited and post-treated states. The quasi-static tensile properties at room temperature are investigated at several different locations along the build direction and at different orientations for both considered states. A comparison between the excised miniature tensile specimens and standard-sized sample results have also been conducted and exhibit very good agreement. Significant anisotropy is present in mechanical properties at different build heights for the as-deposited state, while the post-treated material exhibited more homogenous properties, both along the height and for different sampling orientations. However, significant reductions (e.g., >30%) in the strength (Yield, UTS) along with a significant increase in the reduction in area at fracture is found for post-processed materials. Metallography and fractography analyses were conducted in order to begin to determine the source(s) of this anisotropy for the as-deposited state.

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“…If properly established and executed, small sized specimen techniques can efficiently replace standard sized specimens testing for many cases. There has been presented small sized tests for determination of tensile properties, high cycle and low cycle fatigue, notch and fracture toughness, creep tests [1][2][3][4][5][6][7][8][9][10][11]. One of the wider methods used for these properties is Small Punch Test (SPT) [12].…”

Section: Introductionmentioning

confidence: 99%

Specimens Preparation Influence on Results of Micro-Tensile Tests

Džugan¹,

Sindelarova²,

Procházka³

et al. 2016

dteees

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Small sized specimens become more and more used nowadays and thus more attention is paid to small sized specimens techniques development. Small sized techniques are used for mechanical properties determination in cases when limited amount of the experimental material iv available, such as, evaluation of residual operation time of in service components, mechanical properties assessment of newly developed materials (e.g. severe plastic deformation techniques) and determination of local properties of larger components. Downsizing specimens dimensions lead to increasing demand on the quality of applied testing procedures and samples preparation. The current paper deals with Micro-Tensile Tests and specifically with parameters of specimens preparation on the test results. several preparation procedures are going to be compared with results obtained on the standard sized specimens. Moreover, also the grain size influence on results on small sized specimens is assessed here.

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Mechanical characterization of post-buckled micro-bridge beams by micro-tensile testing

Cited by 6 publications

References 25 publications

Fabrication and characterisation of suspended microstructures of tantalum

Fabrication and characterisation of suspended microstructures of tantalum

The Use of Miniature Specimens to Determine Local Properties and Fracture Behavior of LPBF-Processed Inconel 718 in as-Deposited and Post-Treated States

Specimens Preparation Influence on Results of Micro-Tensile Tests

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