2020
DOI: 10.3390/mi11010102
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Mechanical Behavior Investigation of 4H-SiC Single Crystal at the Micro–Nano Scale

Abstract: In this paper, theoretical models of the critical indentation depth and critical force on brittle materials using cleavage strength and contact theory are proposed. A Berkovich indenter is adopted for nanoindentation tests on a 4H-SiC single crystal sample to evaluate its mechanical behaviors. The stages of brittle material deformation (elastic, plastic, and brittle) can be characterized by the load versus indentation depth curves through the nanoindentation test. The curve of the elastic deformation stage fol… Show more

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Cited by 24 publications
(10 citation statements)
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“…The plastic deformation of brittle materials is well known. When the load applied to an indenter is small enough, the elasticity and plasticity behaviors of 4H-SiC single crystals can be verified via the nanoindentation test [28]. As the load is further increased, a median crack appears from the bottom of plastic zone, as shown in Figure 1.…”
Section: Indentation Crack System Of Brittle Materialsmentioning
confidence: 93%
See 1 more Smart Citation
“…The plastic deformation of brittle materials is well known. When the load applied to an indenter is small enough, the elasticity and plasticity behaviors of 4H-SiC single crystals can be verified via the nanoindentation test [28]. As the load is further increased, a median crack appears from the bottom of plastic zone, as shown in Figure 1.…”
Section: Indentation Crack System Of Brittle Materialsmentioning
confidence: 93%
“…The indentation hardness and indentation modulus of 4H-SiC single crystals on the (0001) face without cracks were 35.81 GPa and 461.3 GPa, respectively [28]. The results in Section 4.1 were used in Equations ( 5) and ( 6) and the fracture toughness results of 4H-SiC single crystals on the (0001) face were obtained, as shown in Figure 9.…”
Section: Determination Of the Fracture Toughnessmentioning
confidence: 99%
“…The size of the crack plays an important role in the characteristics of a material [39][40][41][42]. In real applications, fracture properties carry great significance as cracks and defects are common in materials.…”
Section: Crack Size Effectmentioning
confidence: 99%
“…Figure 10 shows the schematic diagram of the contact between the indenter and workpiece [27]. When the load is small, the tip of Berkovich indenter could be approximated to a sphere [28], and the scratch hardness can be defined by Eq. (1).…”
Section: Mechanism Of Materials Removal and Crack Propagationmentioning
confidence: 99%