Mechanical and vibrational responses of gate-tunable graphene resonator

Lei, Yuqing; Sun, Jiangping; Gong, Xionghui

doi:10.1016/j.physb.2014.12.012

Cited by 7 publications

(3 citation statements)

References 42 publications

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“…14 Investigation of nanostructures can also be carried out by finite element analysis ignoring length scale effects and intermolecular forces to predict qualitative nature of the results. 10,15 Frequency splitting phenomenon in MNEMS circular plates has been earlier observed in few research works. Davidovkj et al 16 have experimentally observed frequency splitting in higher degenerated modes of a perfect circular graphene drum under thermal fluctuations.…”

Section: Introductionmentioning

confidence: 85%

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A mechanism of tunable frequency splitting in electrostatically actuated circular plates

Das

Bhushan

2022

Proceedings of the Institution of Mechanical Engineers, Part C:

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In this paper, we address a new mechanism of frequency splitting of vibration modes in electrostatically actuated perfectly flat submicron circular nanoplates. The splitting is generated by actuating the nanoplate through asymmetric electrostatic force. We have found that the same natural frequency of two degenerated modes of a circular nanoplate splits into two distinct natural frequencies after applying asymmetric electrostatic force. Further, the frequency difference of the splitted modes can be tuned by varying the magnitude of electrostatic actuation force. Finite element analysis has been used to demonstrate this frequency splitting behaviour. The nature of this type of splitting phenomenon is also compared with frequency splitting of imperfect plates and found significantly different. We also study the effects of geometrical parameters and residual stress on this voltage actuation based frequency splitting behaviour.

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Section: Introductionmentioning

confidence: 85%

Section: Introductionmentioning

confidence: 99%

A mechanism of tunable frequency splitting in electrostatically actuated circular plates

Das

Bhushan

2022

Proceedings of the Institution of Mechanical Engineers, Part C:

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“…By applying tension, the resonance frequencies can be tuned in-situ [18][19][20]. This is usually done by applying a DC voltage to a nearby gate to induce a deformation of the resonator via the electrostatic potential [21][22][23]. However, one does not only induce tension by applying an electrostatic potential, but one also changes the number of charge carriers [24][25][26], which both affect the properties of the resonator [27,28].…”

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confidence: 99%

Tunable mechanical coupling between driven microelectromechanical resonators

Verbiest

Goldsche

et al. 2016

Applied Physics Letters

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We present a microelectromechanical system, in which a silicon beam is attached to a comb-drive actuator, that is used to tune the tension in the silicon beam, and thus its resonance frequency. By measuring the resonance frequencies of the system, we show that the comb-drive actuator and the silicon beam behave as two strongly coupled resonators. Interestingly, the effective coupling rate (∼ 1.5 MHz) is tunable with the comb-drive actuator (+10%) as well as with a side-gate (−10%) placed close to the silicon beam. In contrast, the effective spring constant of the system is insensitive to either of them and changes only by ±0.5%. Finally, we show that the comb-drive actuator can be used to switch between different coupling rates with a frequency of at least 10 kHz.Micro-and nanoelectromechanical resonators have attracted much attention thanks to their potential application as sensors [1][2][3][4][5][6][7][8], filters [9][10][11], amplifiers [12,13], and logic gates [14], with frequencies varying from the kHz to the GHz range [15][16][17]. By applying tension, the resonance frequencies can be tuned in-situ [18][19][20]. This is usually done by applying a DC voltage to a nearby gate to induce a deformation of the resonator via the electrostatic potential [21][22][23]. However, one does not only induce tension by applying an electrostatic potential, but one also changes the number of charge carriers [24][25][26], which both affect the properties of the resonator [27,28]. An ideal candidate to circumvent this problem is the comb-drive actuator, which is nowadays widely used to detect accelerations and rotations as well as to manipulate, stretch, or move objects [29][30][31][32][33]. By mechanically fixing a resonator to a comb-drive, one can purely mechanically induce strain in the resonator. Depending on the type of comb-drive actuator, this induced strain can be either tensile or compressive. The former allows the disentanglement of strain and charge carrier density effects in mechanical resonators, whereas the latter is particularly relevant to gain control over buckling modes in mechanical resonators [34,35].Coupled micro-and nanomechanical resonators are known to show sensitive sympathetic oscillation dynamics that show better performance in potential applications than a single resonator [36][37][38][39][40]. One major challenge for this type of resonators is an in-situ control over the coupling [41]. From a fundamental point of view, a tunable mechanical coupling is interesting because of the feasibility to coherently manipulate phonon populations in coupled resonators [42,43] and to create intrinsically localized modes [44]. From an applied point of view, researchers are able to build novel mass sensors, bandpass filters, and single-electron detectors [45][46][47]. Fast in-situ control over the coupling between mechanical resonators is an important step towards mechanical logic gates [48]. Comb drives are suspended microelectromechanical sys- The scale bars indicate 20 µm, 2 µm and 10 µm, from left to right. T...

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