2001
DOI: 10.1016/s0043-1648(00)00519-6
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Mechanical and tribological properties of CNx films deposited by reactive magnetron sputtering

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Cited by 90 publications
(34 citation statements)
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“…The XRD did not reveal the presence of extra peaks indicating that the multilayer has an amorphous structure, as it was expected for CNx, because of the low substrate temperature used during the deposition process [16]. The diffractogram obtained also confirms the results of previous research which suggests that crystalline TIAlCN/VCN multilayers and TiAlCN coatings become amorphous when the carbon content increases [43].…”
Section: Sem and Xrdsupporting
confidence: 82%
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“…The XRD did not reveal the presence of extra peaks indicating that the multilayer has an amorphous structure, as it was expected for CNx, because of the low substrate temperature used during the deposition process [16]. The diffractogram obtained also confirms the results of previous research which suggests that crystalline TIAlCN/VCN multilayers and TiAlCN coatings become amorphous when the carbon content increases [43].…”
Section: Sem and Xrdsupporting
confidence: 82%
“…It has: a metal layer of TiAlV to promote adhesion of the multilayer, 9 layers of CNx alternating with 9 layers of TiAlVCN and finally a relatively thick CNx layer deposited on the top of the multilayer to reduce the coating COF [16]. Based on prior work by our group, the total thickness of the multilayer has been chosen to be from 3.0 to 3.5 µm [30].…”
Section: Materials and Experimental Proceduresmentioning
confidence: 99%
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