Mechanical and Dielectric Properties of Pure‐Silica‐Zeolite Low‐<i>k</i> Materials

Li, Zijian; Johnson, Mark; Sun, Minwei; Ryan, E. Todd; Earl, David J.; Maichen, Wolfgang; Martin, J.; Li, Shuang; Lew, Christopher M.; Wang, Junlan; Deem, Michael W.; Davis, Mark E.; Yan, Yushan

doi:10.1002/anie.200602036

Cited by 142 publications

(54 citation statements)

References 24 publications

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“…This porosity is also in agreement with results from the Maxwell Garnett model [33] applied to MFI with refractive index reported to be 1.39 [22] and a solid matrix with refractive index of quartz equal to 1.543 at 627.8 nm [34]. Finally, MEL thin film porosity measurements were also in good agreement with previous nitrogen adsorption measurements on powder samples [6,28].…”

Section: Comparison Between Psz Mel and Psz Mfi Filmssupporting

confidence: 80%

“…The present study establishes that the dielectric constant of MEL thin films can be reduced without decreasing the film's thermal conductivity. Furthermore, dielectric constant as low as 1.5 were reported for PSZ MEL thin films with porosity of 64% [28]. This is as low as that of sol-gel templated mesoporous silica thin films of similar porosity [41][42][43].…”

Section: Comparison Of Thermal and Dielectric Propertiesmentioning

confidence: 85%

“…Four different second stage synthesis times for PSZ MEL samples were considered, namely 15, 18, 21, and 24 hours. The film porosity ranged from 40 to 59% [6,28]. An absolute error of ± 2% on porosity was obtained from repeated nitrogen adsorption/desorption experiments on similar powder samples.…”

Section: Thermal Conductivity Measurementsmentioning

confidence: 99%

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Thermal Conductivity of Pure Silica MEL and MFI Zeolite Thin Films

Coquil

Pilon

Lew

et al. 2010

2010 14th International Heat Transfer Conference, Volume 6

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This paper reports the room temperature cross-plane thermal conductivity of pure silica zeolite PSZ MEL (Socony Mobil -eleven) and MFI (Socony Mobile -five) thin films. PSZ MEL thin films were prepared by spin coating a suspension of MEL nanoparticles in 1-butanol solution onto silicon substrates followed by calcination and vapor-phase silylation with trimethylchlorosilane. The mass fraction of nanoparticles within the suspension varied from 16 to 55%. This was achieved by varying the crystallization time of the suspension. The thin films consisted of crystalline MEL nanoparticles embedded in a nonuniform and highly porous silica matrix. They featured porosity, relative crystallinity and MEL nanoparticles size ranging from 40 to 59%, 23 to 47% and 55 to 80 nm, respectively. PSZ MFI thin films were made by in-situ crystallization, were b-oriented, fully crystalline and had a 33% porosity. Thermal conductivity of these PSZ thin films was measured at room temperature using the 3ω method. Despite increases in (i) relative crystallinity, (ii) MEL nanoparticle size, and (iii) yield, as the nanoparticle crystallization time was increased, the cross-plane thermal conductivity of the MEL thin films remained nearly unchanged around 1.02±0.10 W/m·K. Indeed, the effects of these parameters on the thermal conductivity were compensated by the simultaneous increase in porosity. PSZ MFI thin films were found to have similar thermal conductivity as MEL thin films even though they had smaller porosity. Finally, the average thermal conductivity * Address all correspondence to this author.† Address all correspondence to this author.of the PSZ films was three to five times larger than that reported for amorphous sol-gel mesoporous silica thin films with similar porosity and dielectric constant.

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Section: Comparison Between Psz Mel and Psz Mfi Filmssupporting

confidence: 80%

Section: Comparison Of Thermal and Dielectric Propertiesmentioning

confidence: 85%

See 1 more Smart Citation

Thermal Conductivity of Pure Silica MEL and MFI Zeolite Thin Films

Coquil

Pilon

Lew

et al. 2010

2010 14th International Heat Transfer Conference, Volume 6

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“…Older studies by Astala et al 6 reported computed elastic properties of several frameworks including silicalite, whose comparison with experimental data was however controversial. Li et al 7 have investigated experimentally zeolite structures with low dielectric constant and measured elastic constants as a function of porosity.…”

Section: Methodsmentioning

confidence: 99%

Binding is responsible for exceptional hardness in polyethylene/silicalite nanocomposite materials

Maschio

2014

CrystEngComm

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“…Since silicon is tetravalent, pure-silica zeolites (PSZs) do not contain framework charges and consequently no cations, which would be detrimental for electronic applications, are present. Due to their dense crystalline structure, better mechanical properties are expected [131], and since their pore size (< 2 nm) is significantly smaller than integrated circuit (IC) features, the problem of electrical breakdown should be mitigated by the absence of any randomly occurring large pores.…”

Section: Silica Zeolitesmentioning

confidence: 99%