Mechanical and Dielectric Properties of Pure‐Silica‐Zeolite Low‐k Materials

Abstract

k wie konkurrenzlos: Wegen ihrer kristallinen Struktur zeigten Zeolithe aus reinem Siliciumdioxid (pure silica zeolites, PSZs) in Experimenten bei jeder betrachteten Porosität oder Dielektrizitätskonstante (k) deutlich höhere Elastizitätsmoduln als amorphes Siliciumdioxid. Experimentelle und theoretische Ergebnisse deuten an, dass PSZs als nächste Generation von Low‐k‐Isolatoren infrage kommen.

Halloysite nanotube-based electrospun ceramic nanofibre mat: a novel support for zeolite membranes

“…Thus dissolution of Al from the support and penetration into the zeolite layer during the hydrothermal synthesis is inevitable under the alkaline synthesis condition [57]. This characteristic of no Al leaching from the HNM supports can be regarded as a congenital advantage for applications that need pure-silica zeolite layer-like separation membranes for organics removal [51] and also low-k materials for dielectric insulator applications [58]. …”

Oriented growth and assembly of zeolite crystals on substrates

“…The continuing development of semiconductor industry requires the future generations of computer microprocessors using low-dielectric-constant (low-k) materials to replace dense silica(k=4), which was the choice of dielectric insulator from beginning. The spin-coated pure-silicazeolite films with excellent mechanical strength, lower k values and less moisture sensitivity are promising low-k materials [70,71] . Nafion membranes are the most commonly used proton exchange membrane for direct methanol fuel cells (DMFCs).…”

Silicalite-1 membrane encapsulated Rh/activated-carbon catalyst for hydroformylation of 1-hexene with high selectivity to normal aldehyde

“…Because of the unique pore and channel structure, shape selectivity, hydrophobic property, and thermal stability, the MFI type zeolite membrane, including silicalite-1 and ZSM-5, has been studied considerably in separation [5,6], membrane reactor [7][8][9][10], chemical sensor [11], corrosion protection [12] and electronic device [13,14]. The zeolite membrane can be supported onto the inert materials, such as ␣-Al 2 O 3 , SiO 2 , and stainless steel [12,[15][16][17], to separate target molecule from mixtures, and can be incorporated in membrane reactors to separate products and to overcome thermodynamic equilibrium limitations [7][8][9][10].…”