Highly polarizable metastable He* (2 3 S) and Ne* (2 3 P) atoms have been diffracted from a 100 nm period silicon nitride transmission grating and the van der Waals coefficients C3 for the interaction of the excited atoms with the silicon nitride surface have been determined from the diffraction intensities out to the 10th order. The results agree with calculations based on the non-retarded Lifshitz formula.PACS numbers: 34.50.Dy, 03.75.BeThe van der Waals (vdW) force between atoms, molecules and solid surfaces is of far reaching importance in many branches of physics, chemistry, and biology [1]. For larger distances, retardation due to the exchange of virtual photons has to be included, while for distances much smaller than the smallest wavelength a non-retarded approach can be used. The theoretical foundations for atom-surface interactions were laid in the pioneering work of Lifshitz [2]. In this case the non-retarded vdW potential has the form −C 3 /l 3 in leading order, where l is the atom-surface separation and C 3 depends on the atom, its electronic state, and on the electronic states of the solid.For groundstate rare gas atoms the C 3 coefficients have recently been measured with good accuracy [3]. Less is known about the van der Waals interactions of electronically excited metastable and Rydberg atoms, in particular the C 3 coefficient is not accurately known. Some time ago, transmission through narrow channels [4] and level shifts in closed or semi-infinite cavities [5,6] have been studied. Recently, inelastic electronic transitions on passage over a metal edge [7] and reflection from surfaces and (reflection) gratings [8] have been measured. Currently there is great interest in these potentials, in particular for metastable helium which is widely used in atom optics [9] as well as in surface physics [10] and for which Bose-Einstein condensation has recently been achieved [11]. The atom-surface van der Waals potentials could soon become relevant in guiding slow metastable rare gas atoms along microstructures [12] or in studying collective effects of Bose-Einstein condensed metastable He* atoms in contact with a surface.From a theoretical point of view atoms in excited states are of particular interest. Their polarizability α is expected to increase as n 7 , with correspondingly much stronger interactions [13]. Therefore it is not obvious whether approximate formulae for the groundstate atom-surface vdW potential are still applicable for excited atoms. Moreover, with the much stronger vdW interaction new effects such as higher multipole coefficients [14] can be expected.In this article, an effective but simple experimental method is used to determine the atom-surface vdW coefficient C 3 for metastable rare gas atoms. It is based on diffraction of an atomic beam from a nanostructured transmission grating with a period of only 100 nm. Modifications in the hierarchy of the intensities of the higher order maxima in the diffraction pattern have been shown to be directly related to the strength C 3 of the atom...