Measuring the thin film elastic modulus with a magnetostrictive sensor

Abstract

This paper reports on the measurement of the thin film Young's modulus for Au, Cr, Cu, Al and SiC materials by a magnetostrictive sensor. Young's modulus of these films was determined by monitoring the sensor's resonant frequency, both before and after deposition. By measuring the film thickness, this frequency shift can be directly related to the film elastic modulus. All thin films were sputter deposited at room temperature with various thicknesses. The determined Young's modulus values were comparable to those found in the literature. An error analysis was performed and parameters such as film thickness and film density were found to dominate the measurement technique. The measurement error was also found to decrease as film thickness increased and was negligible (∼6% or less) for films 0.1 µm thick or greater. The error was also found to be approximately half of that reported by competing techniques. The technique was found to be simple, quick and inexpensive to employ in assessing the thin film elastic properties of both metals and ceramics.

A new method of probing mechanical losses of coatings at cryogenic temperatures

“…The Young's modulus for Chromium thin films Y Cr varies from 90 GPa [32,33] to 240 GPa [33,34] with Y Cr ≈ 170 GPa being the most appropriated value in our case [32]. As for deposited Gold, Y Au ≈ 75 GPa is a convergent value [33,35,36]. Given these values, the weighted average provides a Young's modulus of coating used in our experiments on both surfaces of the quartz substrates estimated by Y CrAu = 81 GPa.…”

Correction for longitudinal mode vibration in thin slender beams

“…23 The strip size was systematically varied in both length and length to width ratio ͑L / W͒ ͑see Table I͒. Rectangular strips of commercially obtained Metglas™ 2826 MB 28 m thick were cut to various sizes with a dicing saw and then cleaned and prepared for testing.…”

Review of magnetostrictive patch transducers and applications in ultrasonic nondestructive testing of waveguides

“…Plate-specific MPTs were not only used for imaging [88], but also for intriguing experiments involving phononic crystal and metamaterial plates [89][90][91], while some modified plate-specific MPTs can be used to generate bulk SH waves [92,93]. The thin magnetostrictive patches used for plate-specific MPTs have also been used for elasticity modulus measurement [94] and structural health monitoring [95][96][97].…”