Measuring the refractive index and thickness of a thin film: an optical polarization experiment
Xiaoqi Zeng,
Ji Chen,
Xiaofeng Wang
et al.
Abstract:We propose a teaching apparatus to simultaneously measure the refractive index and thickness of a thin film. The apparatus includes: a diode laser, a polarizer, a spectrometer, a photodiode and a portable digital multimeter. With the apparatus, we measure the refractive index and thickness of two thin films (a silicon dioxide film on silicon, a silicon nitride film on silicon). The maximum discrepancy between our apparatus and an ellipsometer is 1.4%. We also analyze the errors of our apparatus by numerical si… Show more
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