Measuring angle-resolved dynamic deformation of micromirrors with digital stroboscopic holography

A Comprehensive Characterization Procedure for Resonant MEMS Scanning Mirrors

“…The Q-factor was extracted from a Lorentzian fit to the frequency response. The dynamic deformation was measured with a digital holographic microscope [3] at a resonance frequency of 27,505 Hz at atmospheric pressure. The actuation of the mirror was set to 9 VDC + 18 VPP in phase on the top electrode of the first actuator and out of phase on the top electrode of the second actuator, with the bottom electrode of both actuators on the ground for a 14 • mechanical scan angle (56 • optical).…”

Full-field snapshot phase-shifting low-coherence digital holography

“… – 3 It has found widespread applications in various fields, including biomedicine, 4 , 5 aquatic science, 6 – 8 extraterrestrial life detection, 9 , 10 and micro-electro-mechanical system detection 11 – 13 The fundamental principle of DH is using wave interference to encode the complex amplitude of the object’s light field into an intensity hologram, which a photodetector can capture. Typically, a narrowband laser illumination source is employed to facilitate the matching condition of the optical path between the object and the reference light and to reduce the difficulty of recording interference holograms based on its excellent spatial and temporal coherence.…”