Measurements of residual stresses in the Parylene C film/silicon substrate using a microcantilever beam

Peng, Jyun-Siang; Fang, Weileun; Lin, Hung‐Yi; Hsueh, Chun‐Hway; Lee, Sanboh

doi:10.1088/0960-1317/23/9/095001

Cited by 8 publications

(3 citation statements)

References 46 publications

(74 reference statements)

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“…The shift of the Raman frequency of G (ω G ) and 2D (ω 2D ) modes determines the magnitude of in‐plain strain at the recording point. [ 38,39 ] To evaluate the spatial distribution of strain, we recorded multipoint spectra at 1 µm intervals from 30 × 30 µm area and then made 2D plots of the ω G –ω 2D (Figure 2c,d). As described in previous studies, when a bi‐axial strain is loaded into a graphene sheet, the plots of ω G ‐ω 2D shift on a single line with a slope (Δω 2D /Δω G ) of 2.2.…”

Section: Resultsmentioning

confidence: 99%

Self‐Folding Graphene‐Based Interface for Brain‐Like Modular 3D Tissue

Sakai

Teshima²,

Goto

et al. 2023

Adv Funct Materials

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Electrophysiology of 3D neuronal cultures is of rapidly growing importance for revealing cellular communications associated with neurodevelopment and neurological diseases in their brain‐like 3D environment. Despite that the brain also exhibits an inherent modular architecture that is essential for cortical processing, it remains challenging to interface a modular network consisting of multiple 3D neuronal tissues. Here, a self‐folding graphene‐based electrode array is proposed that enables to reconstruct modular 3D neuronal tissue and investigate firing dynamics among moduli. A graphene‐sandwiched parylene‐C film self‐folds into a cylindrical structure within which living cells can be encapsulated. Culture of encapsulated cells inside the folded graphene enables to spontaneously construct 3D cell aggregates and ensure firm contact between the graphene surface and encapsulated cells. As the inner graphene surface can be utilized as an electrode, the reliable cell–electrode contact allows for long‐term electrical recording from multiple 3D aggregates. Additionally, the modular network consisting of multiple 3D aggregates exhibits richer firing patterns than a conventional homogenous 2D network, which demonstrates that the approach enables measurements of firing dynamics in complex 3D neuronal networks. The deformable graphene electrode will be a powerful platform for investigating complex cellular communications in brain‐like 3D cultures.

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Section: Resultsmentioning

confidence: 99%

Self‐Folding Graphene‐Based Interface for Brain‐Like Modular 3D Tissue

Sakai

Teshima²,

Goto

et al. 2023

Adv Funct Materials

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“…Various flexible electrode substrates have been used in the development of electrodes, including the use of parylene C as a substrate with the addition of Ag/AgCl as a conductive material, PDMS with graphene induction using laser methods, fabric treated with TPU added with MWCNTs and Ag composites, and cotton fabric as a substrate with the addition of PANI and silver nanoparticles (AgNPs). , These flexible electrodes could perform well to replace rigid, conventionally used Ag/AgCl electrodes based on the SNR value evaluation, as seen in Table for previous studies on flexible electrodes.…”

Section: Introductionmentioning

confidence: 99%

Development of Flexible Medical Electrodes Using Carrageenan-Based Bioplastics with the Addition of Conductive Hybrid Materials Graphite and Silver Nanoparticles

Rahman,

Adhika,

Mustofa

et al. 2023

ACS Omega

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“…Many MEMS devices, including cantilevers, diaphragms, and freestanding structures are fabricated by silicon-based bulk and surface micromachining techniques. [11][12][13][14][15] Thin-film based MEMS devices are more easily affected by the residual stress in thin films than those fabricated on inorganic materials such as Si or glass. In general, high residual stress in thin films is considered to be the cause of micro-crack formation and peeling of films from substrates.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of suspended amorphous indium–gallium–zinc oxide thin-film transistors using bulk micromachining techniques

Iwamatsu

Takechi

Yahagi

et al. 2014

Jpn. J. Appl. Phys.

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In this article, we propose a novel application of amorphous indium–gallium–zinc oxide (a-InGaZnO) thin films to micro electromechanical systems (MEMS). For this purpose, we investigated the residual stress in the a-InGaZnO thin films deposited by magnetron sputtering. The films with various residual stresses were characterized using atomic force microscopy, scanning electron microscopy, and X-ray diffraction. We found that the residual stress strongly depended on the sputtering gas pressure. In addition, we discovered a relationship between the residual stress and the microstructure in a-InGaZnO thin films. To gain more insight into the a-InGaZnO thin films with various residual stresses, we fabricated a-InGaZnO thin-film transistors (TFTs), and measured their transfer characteristics. We also fabricated a-InGaZnO TFTs on self-supported membranes, combining the typical TFT fabrication process and bulk micromachining techniques, for the application of a-InGaZnO to MEMS devices.

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Measurements of residual stresses in the Parylene C film/silicon substrate using a microcantilever beam

Cited by 8 publications

References 46 publications

Self‐Folding Graphene‐Based Interface for Brain‐Like Modular 3D Tissue

Self‐Folding Graphene‐Based Interface for Brain‐Like Modular 3D Tissue

Development of Flexible Medical Electrodes Using Carrageenan-Based Bioplastics with the Addition of Conductive Hybrid Materials Graphite and Silver Nanoparticles

Fabrication of suspended amorphous indium–gallium–zinc oxide thin-film transistors using bulk micromachining techniques

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