Measurement technique developed to evaluate transient EMI in a photo bay

Rudack, Andrew C.; Pendley, Michael; Levit, L. B.

doi:10.1016/s0304-3886(01)00149-8

Cited by 6 publications

(2 citation statements)

References 2 publications

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“…ESD-induced damage was created by subjecting a non-static dissipative reticle storage case to an approximate 7000 volt field (Field Induced Damage -FID), with the Canary Reticle inside [1,2]. ESD detection was accomplished using transient electromagnetic interference measurement on a Digital Sampling Oscilloscope [3]. …”

Section: Methodsmentioning

confidence: 99%

Mask damage by electrostatic discharge: a reticle printability evaluation

Rudack¹,

Levit

Williams³

2002

SPIE Proceedings

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An evaluation of a Photolithography Mask damaged by Electrostatic Discharge (ESD) is presented, using pictures and data from the toolset at International SEMATECH's Advanced Technology Development Facility. The Photomask used in the printability evaluation is the Canary (DuPont TM) Reticle, demonstrating various degrees of ESD-induced damage to a repeating structure contained in the chromeon-quartz pattern. Levels of damage to the chrome structures vary from non-existent, to barely detectable, to moderate, to catastrophic. The ESD-induced damage is then measured and compared through an assortment of Mask Metrology tools.

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Section: Methodsmentioning

confidence: 99%

Mask damage by electrostatic discharge: a reticle printability evaluation

Rudack¹,

Levit

Williams³

2002

SPIE Proceedings

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“…The goal was to induce an Electrostatic Discharge (ESD), and attempt to damage the reticle's chrome structures via the Field Induced Damage Model. Electrostatic Discharge emits a radio wave in the 100 MHz to 2.0 GHz frequency range, which can be detected using a Digital Sampling Oscilloscope and antenna [2]. Once detected via radio wave sampling techniques, the Field Induced Damage is evaluated on a KLA STARlight™ inspection tool, and a damage map provided.…”

mentioning

confidence: 99%

Induced ESD damage on photomasks: a reticle evaluation

Rudack¹,

Pendley²,

Gagnon

et al. 2003

SPIE Proceedings

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An Electric-field (E-field) exposure tool for Photomasks was designed, assembled, then utilized to subject 250 nanometer technology node reticles to variable electric fields. A similar study had been demonstrated using the Canary™ Reticle [1]. The goal was to induce an Electrostatic Discharge (ESD), and attempt to damage the reticle's chrome structures via the Field Induced Damage Model. Electrostatic Discharge emits a radio wave in the 100 MHz to 2.0 GHz frequency range, which can be detected using a Digital Sampling Oscilloscope and antenna [2]. Once detected via radio wave sampling techniques, the Field Induced Damage is evaluated on a KLA STARlight™ inspection tool, and a damage map provided. A Digital Instruments Atomic Force Microscope utilizes the damage map to locate defects for further evaluation.

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Reliable study of digital IC circuits with margin voltage among variable DC power supply, electromagnetic interference and conducting wire antenna

Tsai

2003

Microelectronics Reliability

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Measurement technique developed to evaluate transient EMI in a photo bay

Cited by 6 publications

References 2 publications

Mask damage by electrostatic discharge: a reticle printability evaluation

Mask damage by electrostatic discharge: a reticle printability evaluation

Induced ESD damage on photomasks: a reticle evaluation

Reliable study of digital IC circuits with margin voltage among variable DC power supply, electromagnetic interference and conducting wire antenna

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